세라믹-금속 나노복합체를 이용한 박막 내장형 저항체
    3.
    发明公开
    세라믹-금속 나노복합체를 이용한 박막 내장형 저항체 失效
    使用陶瓷金属纳米复合材料制备的薄膜嵌入电阻

    公开(公告)号:KR1020100095308A

    公开(公告)日:2010-08-30

    申请号:KR1020090014518

    申请日:2009-02-20

    Abstract: PURPOSE: A thin film embedded resistor prepared using a ceramic-metal nano-composite is provided to increase the integration of a circuit, thereby allowing a user to implement a fine pitch member. CONSTITUTION: An oxidation silicon - platinum nano-composite is deposited on a substrate to distribute platinum particle inside a matrix. The oxidation silicon - platinum nano-composite has an atomic ratio of 67:33 or 42:58 of oxidation silicon and platinum, respectively. The size of the platinum particles distributed within the oxidation silicon matrix is 3-5 nm. The thin film embedded register has 3K at a TCR of 100 ppm.

    Abstract translation: 目的:提供使用陶瓷 - 金属纳米复合材料制成的薄膜嵌入式电阻器,以增加电路的集成度,从而允许使用者实现细间距元件。 构成:将氧化硅 - 铂纳米复合材料沉积在基底上以将铂颗粒分布在基体内。 氧化硅 - 铂纳米复合材料的氧化硅和铂的原子比分别为67:33或42:58。 分布在氧化硅基质中的铂颗粒的尺寸为3-5nm。 薄膜嵌入寄存器在TCR为100ppm时具有3K。

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