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公开(公告)号：KR102102252B1
公开(公告)日：2020-04-20
申请号：KR1020180039526
申请日：2018-04-05
Applicant: 성균관대학교산학협력단
IPC: H01L21/8238 , H01L29/737 , H01L29/66 , H01L29/43 , H01L21/3205
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