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公开(公告)号:KR102119708B1
公开(公告)日:2020-06-08
申请号:KR1020180014051
申请日:2018-02-05
Applicant: 숭실대학교산학협력단
Inventor: 신익수 , 강문성 , 박지은 , 고은송
IPC: H01L51/56 , H01L51/00 , H01L21/67 , H01L51/50