公开(公告)号：KR1020130117246A

公开(公告)日：2013-10-25

申请号：KR1020120040236

申请日：2012-04-18

Applicant: 엠엔티(주)

Inventor： 김유호 ,  정연오

IPC: G01B11/30

CPC classification number: G01B11/30 ,  G01N21/8806

Abstract: PURPOSE: A movable optical device for checking the surface of a workpiece is provided to have the structure on which a lens is moved and to remove a stage which is utilized for a microscope, thereby confirming the surface of a workpiece while the workpiece is placed on the ground surface or a disc according to conditions of a field. CONSTITUTION: A movable optical device for checking the surface of a workpiece includes an optical unit (10), a body unit (20), and a base unit (30). The optical unit includes a lens (11), a lighting unit (12), and a three-axis precise transferring stage (13). The lens is formed in order to observe a workpiece object. The lighting unit lights to the workpiece. The three-axis precise transferring stage moves the lens and the lighting unit in x, y, and z axes. The body unit includes a column (21), an elevating block (22), an arm (23), and a rotation movable block (24). The base unit, which is a movable structure, is installed on the ground surface, thereby supporting the body unit.

Abstract translation: 目的：提供用于检查工件表面的可移动光学装置以具有移动透镜的结构，并且去除用于显微镜的台，从而在放置工件时确认工件的表面 地面或盘根据场的条件。 构成：用于检查工件表面的可移动光学装置包括光学单元（10），主体单元（20）和基座单元（30）。 光学单元包括透镜（11），照明单元（12）和三轴精确转印台（13）。 为了观察工件物体而形成透镜。 照明装置照亮工件。 三轴精密转印台将透镜和照明单元移动到x，y和z轴。 主体单元包括柱（21），升降块（22），臂（23）和旋转可动块（24）。 作为可移动结构的基座单元安装在地面上，从而支撑主体单元。