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公开(公告)号：KR101415293B1
公开(公告)日：2014-07-04
申请号：KR1020120058124
申请日：2012-05-31
Applicant: 연세대학교 산학협력단
IPC: H01L29/861
Abstract: 본 발명은 전기 전도도가 우수한 그라핀과 이와 전자 주고받기가 용이한 팔라듐을 소재로 간단한 리소그라피 공정을 통해 안정성과 양산성이 우수한 반도체 소자를 제조할 수 있는 반도체 소자 제조방법 및 이 제조방법을 통해 제조된 반도체 소자를 제공한다. 이를 위한 본 발명은 반도체 소자 제조방법에 있어서, 기판에 홈을 형성한 후 상기 홈 내부에 게이트 전극과 유전체를 순차적으로 적층하는 단계와; 상기 유전체의 상부면과 접촉되도록 기판 위에 그라핀을 도포하는 단계와; 상기 도포된 그라핀을 리소그라피 공정을 이용하여 원하는 모양으로 패터닝하는 단계와; 상기 패터닝된 그라핀의 일부분에 팔라듐이 코팅될 수 있도록 기판 위에 포토레지스트를 도포한 후 리소그라피 공정을 통해 패터닝하는 단계와; 상기 패터닝된 포토레지스트 위에 팔라듐을 증착하여 그라핀의 일부분에 팔라듐을 코팅하는 단계와; 상기 그라핀의 일부분에 코팅된 팔라듐을 제외한 모든 포토레지스트와 팔라듐을 제거하는 단계; 및 상기 그라핀의 양쪽에 연결되도록 소스 전극과 드레인 전극을 형성하는 단계;를 포함하는 것을 특징으로 한다.
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公开(公告)号：KR101352948B1
公开(公告)日：2014-01-27
申请号：KR1020120047855
申请日：2012-05-07
Applicant: 연세대학교 산학협력단
Abstract: 본 발명에 따른 광 인식 스크린은 레이저와 같은 광원을 이용하여 스크린에 정보를 입력함으로써 스크린으로부터 원거리에서도 정보의 입력이 가능하며, 유리 기판, 상기 유리 기판에 제1전극, 제1P-N접합부 및 제2전극이 순차적으로 포함되어 적층된 전기적인 신호를 빛으로 전환하는 엘이디 및 상기 유리 기판에 상기 제1전극, 제2P-N접합부 및 제3전극이 순차적으로 포함되어 적층된 빛을 전기적인 신호로 전환하는 수광부를 포함하여 구성된다.
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公开(公告)号：KR1020130134538A
公开(公告)日：2013-12-10
申请号：KR1020120058123
申请日：2012-05-31
Applicant: 연세대학교 산학협력단
Abstract: The present invention relates to an ultra-sensitive graphene sensor, which is able to tune a response sensitivity, having a fast-recovery and renewability, and a manufacturing method thereof comprising: a substrate where a groove is formed; a dielectric layer which is formed inside the groove; a graphene layer, which is formed to be in contact with the dielectric layer partially while being in contact with an upper surface of a substrate, which is positioned in the left side and the right side of the groove; a source electrode and a drain electrode, which are connected to both sides of the graphene layer respectively by being stacked over the substrate; and a gate electrode, which is formed to be in contact with the dielectric layer inside the groove, and in which a voltage is applied from an outside.
Abstract translation: 本发明涉及能够调节具有快速恢复和可更新性的响应灵敏度的超敏感石墨烯传感器及其制造方法，其包括：形成凹槽的基板; 形成在所述槽内的电介质层; 石墨烯层，其形成为与位于槽的左侧和右侧的基板的上表面接触部分地与电介质层接触; 源极电极和漏极电极，其分别通过层叠在所述基板上而连接到所述石墨烯层的两侧; 以及栅电极，其形成为与沟槽内的电介质层接触，并且其中从外部施加电压。
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公开(公告)号：KR1020130124623A
公开(公告)日：2013-11-15
申请号：KR1020120047855
申请日：2012-05-07
Applicant: 연세대학교 산학협력단
CPC classification number: G09F9/33 , G09F13/22 , G09F13/42 , G09F2013/222 , Y10S362/80
Abstract: A photo-detecting screen according to the present invention comprises a glass substrate; a first electrode on the glass substrate; a first P-N junction part and an LED having a second electrode and changing electric signal into light; and a light receiving part having a lamination structure of a first electrode, a second P-N junction part, and a third electrode and changing the light into the electric signal.
Abstract translation: 根据本发明的光电检测屏幕包括玻璃基板; 玻璃基板上的第一电极; 第一P-N接合部分和具有第二电极并且将电信号变换成光的LED; 以及具有第一电极，第二P-N接合部和第三电极的层叠结构的光接收部，并将光变换为电信号。
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Patent Agency Ranking
公开(公告)号：KR1020140060070A
公开(公告)日：2014-05-19
申请号：KR1020120126716
申请日：2012-11-09
Applicant: 연세대학교 산학협력단
IPC: H01L21/8242 , H01L27/108
CPC classification number: H01L28/75 , H01L21/0274 , H01L21/3065 , H01L28/56
Abstract: The present invention provides a capacitor manufacturing method capable of improving the efficiency and performance of a capacitor by converting the dielectric constant of a dielectric included between the two electrodes of the capacitor and the effective capacitance of the capacitor. The capacitor manufacturing method of the present invention comprises (a) a step of preparing graphine oxide existed in a solution condition; (b) a step of applying alternating current to a gap between the two electrode layers after forming a first electrode layer and a second electrode layer on a circuit board; (c) a step of forming a graphene oxide dielectric layer between the two electrode layers using a dielectrophoresis method after dropping graphene oxide solution between the two electrode layers in which the alternating current is applied; and (d) a step of combining chemicals on the surface of the graphene oxide dielectric layer formed between the two electrode layers.
Abstract translation: 本发明提供一种能够通过转换电容器的两个电极之间的电介质的介电常数和电容器的有效电容来提高电容器的效率和性能的电容器制造方法。 本发明的电容器制造方法包括（a）在溶液状态下制备石墨氧化物的步骤; （b）在电路板上形成第一电极层和第二电极层之后，向两个电极层之间的间隙施加交流电流的步骤; （c）在施加交流电的两个电极层中滴加石墨烯氧化物溶液之后，使用介电电泳法在两个电极层之间形成石墨烯氧化物电介质层的步骤; 和（d）在形成在两个电极层之间的氧化石墨烯介电层的表面上组合化学品的步骤。
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公开(公告)号：KR1020130134539A
公开(公告)日：2013-12-10
申请号：KR1020120058124
申请日：2012-05-31
Applicant: 연세대학교 산학협력단
IPC: H01L29/861
CPC classification number: H01L29/1606 , H01L29/4236 , H01L29/66621
Abstract: The present invention provides a method for manufacturing a semiconductor device having excellent stability and productivity through a simple lithography process with graphene having good electrical conductivity and palladium allowing easy exchange of electrons with the graphene and a semiconductor device manufactured by the method. The method for manufacturing a semiconductor device according to the present invention comprises the steps of forming a groove in a substrate and sequentially laminating a gate electrode and a dielectric inside the groove; applying graphene on the substrate to touch the upper surface of the dielectric; patterning the applied graphene in a desired shape using a lithography process; applying photoresist to the substrate so that palladium can be coated on a part of the patterned graphene and then patterning the photoresist through the lithography process; depositing the palladium on the patterned photoresist to coat the palladium on a part of the graphene; removing all photoresist and palladium except for the palladium coated on the part of the graphene; and forming a source electrode and a drain electrode to be connected to both sides of the graphene.
Abstract translation: 本发明提供了一种制造半导体器件的方法，该半导体器件通过简单的光刻工艺具有优异的稳定性和生产率，其中石墨烯具有良好的导电性和允许易于与石墨烯交换电子的钯和通过该方法制造的半导体器件。 根据本发明的半导体器件的制造方法包括以下步骤：在衬底中形成沟槽，并且在沟槽内依次层叠栅电极和电介质; 在基板上施加石墨烯以接触电介质的上表面; 使用光刻工艺将所施加的石墨烯图案化成期望的形状; 将光致抗蚀剂施加到基底上，使得钯可以涂覆在图案化的石墨烯的一部分上，然后通过光刻工艺图案化光致抗蚀剂; 将钯沉积在图案化的光致抗蚀剂上以在石墨烯的一部分上涂覆钯; 除去涂覆在石墨烯部分上的钯以外的所有光致抗蚀剂和钯; 以及形成与石墨烯两侧连接的源电极和漏电极。
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7.发明公开그라핀을 이용한 인쇄회로기판 제조방법, 이 제조방법에 의해 제조된 인쇄회로기판, 이를 구비한 디스플레이 장치 无效制造方法印刷电路板使用石墨，由制造方法制造的印刷电路板和具有印刷电路板的显示装置
公开(公告)号：KR1020130125571A
公开(公告)日：2013-11-19
申请号：KR1020120049201
申请日：2012-05-09
Applicant: 연세대학교 산학협력단
Abstract: The present invention provides a polymer-based flexible printed circuit board and a fabrication method thereof : capable of fabricating a printed circuit board having superior electrical, optical and mechanical characteristics with costs lower than the existing method; and capable of comprising an electrical and electronic circuit by effectively applying the graphene to the surface, although which surface subject to install is a curved surface by forming a material of a printed circuit board with a flexible polymer material, which printed circuit board uses graphene as a transmission line conductor of the printed circuit board circuit pattern is printed on. The printed circuit board fabrication method using graphene according to the present invention includes: a first step for preparing a substrate consisting of a polymer material; a second step for forming a line groove in a circuit pattern on the substrate; a third step for coating a graphene dispersion solution and intruding the coated graphene dispersion solution in the line groove; a fourth step for removing the graphene dispersion solution coated on the substrate part except for the line groove part; and a fifth step for finally completing a printed circuit board having graphene patterned by vaporizing moisture and volatile material included in the graphene dispersion solution injected into the line groove.
Abstract translation: 本发明提供一种基于聚合物的柔性印刷电路板及其制造方法：能够制造具有优于现有方法成本的电气，光学和机械特性优异的印刷电路板; 并且能够通过有效地将石墨烯施加到表面上而包括电气和电子电路，尽管通过用柔性聚合物材料形成印刷电路板的材料，但是要安装的表面是弯曲表面，印刷电路板使用石墨烯作为 印刷电路板电路图案的传输线导体。 根据本发明的使用石墨烯的印刷电路板制造方法包括：制备由聚合物材料构成的基板的第一步骤; 用于在基板上形成电路图案中的线槽的第二步骤; 第三步，用于涂覆石墨烯分散液并将涂覆的石墨烯分散液侵入管线槽中; 除去涂布在除了线槽部之外的基板部分上的石墨烯分散液的第四步骤; 以及用于最终完成具有通过蒸发注入到线槽中的石墨烯分散溶液中的水分和挥发性材料而图案化的石墨烯的印刷电路板的第五步骤。
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公开(公告)号：KR1020130039119A
公开(公告)日：2013-04-19
申请号：KR1020110103590
申请日：2011-10-11
Applicant: 연세대학교 산학협력단
IPC: C01B31/02 , H01B5/14 , H01B1/04 , H01L21/027
CPC classification number: C01B32/182 , C01B32/194 , H01B1/04 , H01B5/14
Abstract: PURPOSE: A graphene-polymer complex, a device comprising the graphene-polymer complex, and manufacturing method thereof are provided to resolve the problem which the graphene is easily torn and destroyed by contacting with the tip and to form a protection film for the graphene with the aid of polymer hardness. CONSTITUTION: Graphene-polymer complex comprises a planar graphene(20a) and a polymer coating layer(30a). The polymer coating layer is formed by combining polymer at one side or both sides of the graphene and has the flexible and bendable film-type with the graphene layer. The polymer coating layer makes the graphene into the non-conductive material enabling to insulate from the outside.
Abstract translation: 目的：提供石墨烯 - 聚合物复合物，包括石墨烯 - 聚合物复合物的装置及其制造方法，以解决石墨烯与尖端接触而容易地撕裂和破坏并形成用于石墨烯的保护膜的问题， 有助于聚合物硬度。 构成：石墨烯 - 聚合物复合物包括平面石墨烯（20a）和聚合物涂层（30a）。 聚合物涂层通过在石墨烯的一侧或两侧组合聚合物而形成，并且具有柔性且可弯曲的薄膜型石墨烯层。 聚合物涂层使石墨烯成为能够从外部绝缘的非导电材料。
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公开(公告)号：KR1020130112515A
公开(公告)日：2013-10-14
申请号：KR1020120034950
申请日：2012-04-04
Applicant: 연세대학교 산학협력단
CPC classification number: Y02E10/549 , Y02P70/521 , H01L51/441 , B01J19/12 , C01B32/186 , C01B32/23 , H01B5/14
Abstract: PURPOSE: An electrode structural body using graphene oxide, an optoelectrical device and an organic solar cell having the same are provided to increase the efficiency of a battery by using the graphene oxide. CONSTITUTION: A conductive film (224) is formed on a substrate (222). The conductive film comprises graphene oxide. The conductive film is formed by the spin-coating of the graphene oxide. The conductive film is formed by the drop-casting of the graphene oxide. The conductivity and the transparency of the graphene oxide are turned by a reduction treatment.
Abstract translation: 目的：提供使用石墨烯氧化物的电极结构体，光电器件和具有该电极结构体的有机太阳能电池，以通过使用石墨烯氧化物来提高电池的效率。 构成：在基板（222）上形成导电膜（224）。 导电膜包括氧化石墨烯。 导电膜通过石墨烯氧化物的旋涂形成。 导电膜由石墨烯氧化物的滴铸形成。 石墨烯氧化物的导电性和透明度通过还原处理转动。
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