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公开(公告)号：KR102166618B1
公开(公告)日：2020-10-16
申请号：KR1020160123408
申请日：2016-09-26
Applicant: 온세미컨덕터코리아 주식회사
Inventor： 유준형
IPC: H01L27/02 , H01L27/092 , H01L21/265
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