公开(公告)号：KR100465584B1

公开(公告)日：2005-01-13

申请号：KR1020020027453

申请日：2002-05-17

Applicant: 재단법인서울대학교산학협력재단

Inventor： 김현이 ,  박근태

IPC: H01L41/22 ,  G01L9/08

Abstract: PURPOSE: A method of measuring the piezoelectric coefficient of a piezoelectric thin film by using an SMPLM(Strain-Monitoring Pneumatic Loading Method) and a measuring apparatus thereof are provided to be capable of simply and exactly measuring piezoelectricity constant without using a complicated equipment. CONSTITUTION: After preparing a substrate/sample coupled body, the substrate/sample coupled body is located at the center portion of a chamber(10). At this time, the substrate/sample coupled body includes a substrate(12), the first electrode(16) formed on the upper surface of the substrate, a piezoelectric sample(14) formed at the upper portion of the resultant structure, and the second electrode(17) formed on the sample. Then, a strain gauge(18) is attached on the lower surface of the substrate. Pressure variation is measured while vertically applying pressure to the surface of the sample by supplying gas into the chamber. After measuring the electric charge variation of the sample according to the pressure variation of the two electrode, the strain variation of the sample surface is measured according to the pressure variation of the strain gauge. Then, piezoelectric constant is obtained by using the measured values.

Abstract translation: 目的：提供一种通过使用SMPLM（应变监测气动加载方法）和其测量装置来测量压电薄膜的压电系数的方法，以便能够简单且精确地测量压电常数而无需使用复杂的设备。 构成：在制备基底/样品偶联体之后，基底/样品偶联体位于室（10）的中心部分。 此时，衬底/样本耦合体包括衬底（12），在衬底的上表面上形成的第一电极（16），在所得到的结构的上部形成的压电样本（14），以及 第二电极（17）形成在样品上。 然后，将应变仪（18）附着在基板的下表面上。 通过向腔室内供应气体，在对样品表面垂直施加压力的同时测量压力变化。 根据两个电极的压力变化测量样品的电荷变化后，根据应变仪的压力变化测量样品表面的应变变化。 然后，通过使用测量值获得压电常数。

公开(公告)号：KR1020030089294A

公开(公告)日：2003-11-21

申请号：KR1020020027453

申请日：2002-05-17

Applicant: 재단법인서울대학교산학협력재단

Inventor： 김현이 ,  박근태

IPC: H01L41/22 ,  G01L9/08

Abstract: PURPOSE: A method of measuring the piezoelectric coefficient of a piezoelectric thin film by using an SMPLM(Strain-Monitoring Pneumatic Loading Method) and a measuring apparatus thereof are provided to be capable of simply and exactly measuring piezoelectricity constant without using a complicated equipment. CONSTITUTION: After preparing a substrate/sample coupled body, the substrate/sample coupled body is located at the center portion of a chamber(10). At this time, the substrate/sample coupled body includes a substrate(12), the first electrode(16) formed on the upper surface of the substrate, a piezoelectric sample(14) formed at the upper portion of the resultant structure, and the second electrode(17) formed on the sample. Then, a strain gauge(18) is attached on the lower surface of the substrate. Pressure variation is measured while vertically applying pressure to the surface of the sample by supplying gas into the chamber. After measuring the electric charge variation of the sample according to the pressure variation of the two electrode, the strain variation of the sample surface is measured according to the pressure variation of the strain gauge. Then, piezoelectric constant is obtained by using the measured values.

Abstract translation: 目的：使用SMPLM（应变监测气动装载方法）测量压电薄膜的压电系数的方法及其测量装置，能够简单且精确地测量压电常数而不使用复杂的设备。 构成：在制备基板/样品耦合体之后，基板/样品耦合体位于室（10）的中心部分。 此时，基板/样品耦合体包括基板（12），形成在基板的上表面上的第一电极（16），形成在所得结构的上部的压电样品（14） 形成在样品上的第二电极（17）。 然后，在基板的下表面上附着应变仪（18）。 测量压力变化，同时通过向室中供应气体向样品表面垂直施加压力。 在根据两个电极的压力变化测量样品的电荷变化后，根据应变计的压力变化来测量样品表面的应变变化。 然后，通过使用测量值来获得压电常数。