公开(公告)号：KR100671286B1

公开(公告)日：2007-01-19

申请号：KR1020050106505

申请日：2005-11-08

Applicant: 재단법인서울대학교산학협력재단

Inventor： 김용권 ,  이윤식 ,  장윤호 ,  신동식

IPC: C12Q1/68

CPC classification number: B01L9/527 ,  B01L3/5027 ,  C12Q1/6837

Abstract: A single crystalline silicon micro-mirror is provided to have an optically flat mirror plate, show little deformation of a mechanical spring, and have uniform performance of each micro-mirror and relatively long life span, thereby being adequate for preparing a bio-pattern array when synthesizing peptides. The single crystalline silicon micro-mirror used for bio-pattern fabrication of peptide synthesis comprises a first substrate which is made of single crystalline silicon(10) and includes a first binding portion(13) and a second binding portion(15), each being electrically connected to a first electrode pad and a second electrode pad, and a mirror plate(11) which is electrically connected to the first binding portion through a mechanical spring(12) and rotates using the mechanical spring as a shaft and a second substrate which is made of insulating materials such as glass(20) and electrically separated from the mirror plate with being spaced apart from the lower portion of the mirror plate and includes a bottom electrode(21) electrically connected to the second binding portion and made of metal. The first binding portion and the second binding portion are electrically separated by an insulation groove(14) formed for exposing the second substrate.

Abstract translation: 提供单晶硅微反射镜以具有光学平面镜板，几乎不显示机械弹簧的变形，并且具有每个微镜的均匀性能和相对长的寿命，从而足以制备生物图案阵列 当合成肽时。 用于肽合成生物图案制造的单晶硅微镜包括由单晶硅（10）制成并包括第一结合部分（13）和第二结合部分（15）的第一基底 电连接到第一电极焊盘和第二电极焊盘;以及镜板（11），其通过机械弹簧（12）电连接到第一装订部分并且使用机械弹簧作为轴进行旋转，第二基板 由诸如玻璃（20）的绝缘材料制成并且与镜板电隔离并且与镜板的下部分隔开并且包括电连接到第二结合部分并由金属制成的底部电极（21）。 第一装订部分和第二装订部分由形成用于暴露第二基板的绝缘槽（14）电隔离。