公开(公告)号：KR1020090032426A

公开(公告)日：2009-04-01

申请号：KR1020070097668

申请日：2007-09-28

Applicant: 재단법인서울대학교산학협력재단 ,  삼성전자주식회사

Inventor： 최석봉 ,  김갑진

IPC: G01J11/00

Abstract: A quadrant photodiode and a noise elimination method thereof are provided to obtain pure optical AC signal by minimizing the noise quadrant photodiode by the oscillation of the optical system through signal modulation. An optical measurement system using a quadrant photodiode comprises X-axis differential signal of AC current measured in the quadrant photodiode, Y-axis differential signal of AC current and the sum signal of AC current are processed through signal modulation so that pure signal is obtained. The signal modulation removes signal with the signal change by X-axis or Y-axis vibration due to oscillation of the optical system, or with the signal change by the focus shift according to the movement of an objective lens.

Abstract translation: 提供象限光电二极管及其噪声消除方法，以通过信号调制使光学系统的振荡使噪声象限光电二极管最小化来获得纯光AC信号。 使用象限光电二极管的光学测量系统包括在象限光电二极管中测量的交流电流的X轴差分信号，通过信号调制处理交流电流的Y轴差分信号和AC信号的和信号，从而获得纯信号。 信号调制通过由于光学系统的振荡而由X轴或Y轴振动引起的信号变化的信号，或者根据物镜的移动使信号随着焦点偏移而变化。