公开(公告)号：KR1020100074754A

公开(公告)日：2010-07-02

申请号：KR1020080133267

申请日：2008-12-24

Applicant: 전북대학교산학협력단

Inventor： 손인진 ,  고인용 ,  이동목 ,  윤진국 ,  박나라

IPC: C04B35/58 ,  C04B35/565 ,  H01L21/24

CPC classification number: C04B35/58085 ,  C04B35/565 ,  C04B35/584 ,  C04B35/62615 ,  C04B2235/5454 ,  C04B2235/604 ,  C04B2235/6581 ,  C04B2235/666

Abstract: PURPOSE: A producing method of a metal silicide-silicon carbide-silicon nitride composite material is provided to produce the composite material within two minutes by a single process of indirect heating using an induced current. CONSTITUTION: A producing method of a metal silicide-silicon carbide-silicon nitride composite material comprises the following steps: nano-confricating a mixture of metal carbide, metal-nitride, and silicon powder; synthesizing the metal silicide-silicon carbide-silicon nitride composite material by adding the heat generated from an induced current and a pressure to the mixture; removing the pressure and the induced current from the synthesized metal silicide-silicon carbide-silicon nitride composite material; and cooling the metal silicide-silicon carbide-silicon nitride composite material.

Abstract translation: 目的：提供金属硅化物 - 碳化硅 - 氮化硅复合材料的制造方法，通过使用感应电流的单次间接加热工艺在两分钟内生产复合材料。 构成：金属硅化物 - 碳化硅 - 氮化硅复合材料的制造方法包括以下步骤：将金属碳化物，金属氮化物和硅粉末的混合物纳米化; 通过将从感应电流和压力产生的热量加入到混合物中来合成金属硅化物 - 碳化硅 - 氮化硅复合材料; 从合成的金属硅化物 - 碳化硅 - 氮化硅复合材料中去除压力和感应电流; 并冷却金属硅化物 - 碳化硅 - 氮化硅复合材料。