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公开(公告)号：KR101953312B1
公开(公告)日：2019-03-04
申请号：KR1020160167430
申请日：2016-12-09
Applicant: 조선대학교산학협력단
IPC: G01J1/44 , H01L21/285 , H01L31/10 , H01L31/18
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