公开(公告)号：KR100343127B1

公开(公告)日：2002-07-05

申请号：KR1019990053002

申请日：1999-11-26

Applicant: 최덕균

Inventor： 최덕균 ,  이선호 ,  이진원 ,  홍경일

IPC: H01L41/08

Abstract: 도난방지시스템에적용되는후막형태의센서를압전물질을사용하여박막형으로소형화함으로서, 기존의후막형태의센서로인하여야기되는문제점들즉, 센서가쉽게눈에띄고, 그로인하여센서의인위적인파괴가가능하며, 소형제품에는장착하기어려운점 등을개선할 수있음과동시에, 고성능의센서구현이가능하도록한 도난방지시스템용센서및 그제조방법이개시된다. 이를구현하기위하여본 발명에서는, 실리콘기판상의소정부분에, 일면에하나의요철이구비되도록설계된브리지혹은캔틸레버형태의구조물을형성하는단계와; 상기구조물을마스크로이용하여상기실리콘기판을일정두께식각처리하여상기구조물하단에메사형상의실리콘패턴을형성하는단계; 및상기구조물상에상기구조물과동일형태를갖는압전재질의박막을형성하는단계를거쳐제조되는도난방지시스템용센서가제공된다.

公开(公告)号：KR1020010048335A

公开(公告)日：2001-06-15

申请号：KR1019990053002

申请日：1999-11-26

Applicant: 최덕균

Inventor： 최덕균 ,  이선호 ,  이진원 ,  홍경일

IPC: H01L41/08

Abstract: PURPOSE: An electronic article surveillance sensor is provided to reduce the sensor in size as compared with a conventional technology, by making the sensor have a bridge or cantilever type by using a thin film of a piezoelectric material instead of a thick thin of a magnetic material. CONSTITUTION: A silicon pattern(10b) of a mesa shape is formed in a predetermined portion of a silicon substrate(10a). A structure(12a) of a bridge or cantilever type is formed on the silicon pattern to have a size larger than the silicon pattern, and a roughness is formed on a surface of the structure. A thin film of a piezoelectric material is formed on the structure to have the same shape as the structure.

Abstract translation: 目的：提供一种电子物品监控传感器，与传统技术相比，通过使用压电材料的薄膜代替磁性材料的薄薄使传感器具有桥梁或悬臂式，从而减小了传感器的尺寸 。 构成：在硅衬底（10a）的预定部分中形成台面形状的硅图案（10b）。 在硅图案上形成桥或悬臂式的结构（12a）以具有比硅图案更大的尺寸，并且在该结构的表面上形成粗糙度。 在结构上形成压电材料薄膜以具有与该结构相同的形状。