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公开(公告)号：KR102259001B1
公开(公告)日：2021-06-01
申请号：KR1020190164601
申请日：2019-12-11
Applicant: 충남대학교산학협력단
IPC: C08F220/26 , C08F220/04 , C08F220/34 , C08F226/06 , G03F7/004 , G03F7/028 , G03F7/105 , G03F7/00 , G02B5/20 , H01L27/146
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