公开(公告)号：KR101612400B1

公开(公告)日：2016-04-14

申请号：KR1020097027210

申请日：2008-05-28

Applicant: 파이레오스 엘티디.

Inventor： 기베러,카르스텐 ,  슈라이터,마티아스 ,  파울러스,크리스티안

IPC: G01J5/04 ,  G01J5/10 ,  G01J5/22

CPC classification number: G01J5/34 ,  G01J5/00 ,  G01J5/0205 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/04 ,  G01J5/041 ,  G01J5/045 ,  G01J5/14 ,  G01J5/22 ,  G01J2005/0077 ,  G01J2005/204 ,  G01N2021/0106 ,  H01L27/14683 ,  H01L41/0973 ,  Y10T156/10

Abstract: 본발명은상기열 복사를전기신호로변환하기위한하나이상의열 검출기소자가배열되는하나이상의막, 및상기막을지지하고상기전기신호를판독하는하나이상의판독회로를지지하여, 상기검출기소자와상기판독회로가전기도통접속에의해상기막을통해전기접속되는하나이상의회로지지대를포함하는열 복사검출장치에관한것이다. 또한, 본발명은 a) 상기검출기소자를갖춘막과하나이상의전기도통접속을제공하고상기회로지지대를준비하는단계와, b) 상기검출기소자와판독회로가상기막을통과하는전기접속에의해함께전기적으로연결되는방식으로상기막과회로지지대를결합하는단계를포함하는열 복사검출장치제조방법에관한것이다. 제조단계는바람직하게웨이퍼레벨에서수행되며, 기능화된실리콘기판이서로에대해적층되어서로단단히접합된후에개별소자로분할된다. 바람직하게, 검출기소자는파이로-전기검출기소자를포함한다. 상기장치는모션검출기, 프레전스검출기및 열영상카메라분야에적용될수 있다.

公开(公告)号：KR1020100023007A

公开(公告)日：2010-03-03

申请号：KR1020097027210

申请日：2008-05-28

Applicant: 파이레오스 엘티디.

Inventor： 기베러,카르스텐 ,  슈라이터,마티아스 ,  파울러스,크리스티안

IPC: G01J5/04 ,  G01J5/10 ,  G01J5/22

CPC classification number: G01J5/34 ,  G01J5/00 ,  G01J5/0205 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/04 ,  G01J5/041 ,  G01J5/045 ,  G01J5/14 ,  G01J5/22 ,  G01J2005/0077 ,  G01J2005/204 ,  G01N2021/0106 ,  H01L27/14683 ,  H01L41/0973 ,  Y10T156/10

Abstract: The invention relates to a device for detecting thermal radiation, comprising at least one membrane on which at least one thermal detector element for converting the thermal radiation to an electrical signal is arranged, and at least one circuit carrier for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being electrically interconnected through the membrane through an electrical via. The invention also relates to a method for producing said device by way of the following process steps: a) providing the membrane having the detector element and at least one electrical via and providing the circuit carrier, and b) uniting the membrane and the circuit carrier in such a manner that the detector element and the readout circuit are electrically interconnected through the membrane through an electrical via. The production is preferably carried out on the wafer level: Functionalized silicon substrates are stacked, firmly interconnected and then subdivided. The detector elements are preferably pyroelectric detector elements. The device according to the invention is used in motion detectors, presence detectors and thermal imaging cameras.

Abstract translation: 本发明涉及一种用于检测热辐射的装置，该装置包括至少一个薄膜，至少一个用于将热辐射转换成电信号的热检测器元件布置在其上，以及至少一个用于承载膜并用于携带 用于读出电信号的至少一个读出电路，检测器元件和读出电路通过电通孔通过膜电互连。 本发明还涉及通过以下工艺步骤生产所述装置的方法：a）提供具有检测器元件和至少一个电通孔的膜，并提供电路载体，以及b）将膜和电路载体 以使得检测器元件和读出电路通过电通孔通过膜电互连。 生产优选在晶片级上进行：功能化的硅衬底被堆叠，牢固地互相连接然后细分。 检测器元件优选是热电探测元件。 根据本发明的装置用于运动检测器，存在检测器和热成像相机中。