公开(公告)号：KR101422049B1

公开(公告)日：2014-08-14

申请号：KR1020130005778

申请日：2013-01-18

Applicant: 포항공과대학교 산학협력단

Inventor： 전상민 ,  고우리

IPC: G01G11/04 ,  G01G3/12 ,  G01N35/08

CPC classification number: G01G3/16 ,  B82Y15/00 ,  B82Y35/00 ,  G01G11/04

Abstract: The present invention relates to a quartz crystal microbalance sensor and, more particularly, to an electrodeless multichannel quartz crystal microbalance sensor. The multichannel quartz crystal microbalance sensor is characterized in that various patterns with different weights and partially coated on the surface of an electrodeless quartz crystal are exposed to an outside electric field. A multichannel quartz crystal microbalance can obtain multichannel signals by differentiating the weight of patterns at one quartz crystal and can be conveniently manufactured by eliminating an etching process. Unlike a general multichannel quartz crystal microbalance which is driven by individual electric sources by patterning various pairs of electrodes on both surfaces of a quartz crystal, the electrodeless multichannel quartz crystal microbalance can generate a multichannel quartz crystal by materials with different weights and partially patterned on the surface of a quartz crystal, and can measure all of the multichannel quartz crystal frequencies only using a pair of electrodes which is positioned closely to the surface of the quartz crystal.

Abstract translation: 本发明涉及石英晶体微量天平传感器，更具体地说，涉及一种无电极多通道石英晶体微量天平传感器。 多通道石英晶体微量天平传感器的特征在于，具有不同重量且部分涂覆在无电极石英晶体表面上的各种图案暴露于外部电场。 多通道石英晶体微量天平可以通过区分一个石英晶体的图案重量来获得多通道信号，并且可以通过消除蚀刻工艺方便地制造。 与通过在石英晶体的两个表面上构图各种电极的单个电源驱动的通用多通道石英晶体微量天平不同，无电极多通道石英晶体微量天平可以通过具有不同重量的材料产生多通道石英晶体，并且在 石英晶体的表面，并且可以仅使用位于石英晶体表面附近的一对电极来测量所有多通道石英晶体频率。