公开(公告)号：KR101367223B1

公开(公告)日：2014-02-27

申请号：KR1020130019382

申请日：2013-02-22

Applicant: 포항공과대학교 산학협력단

Inventor： 임근배 ,  김성재 ,  김범주 ,  허준성 ,  권혁진

IPC: H01L29/78 ,  H01L21/336

CPC classification number: G01N27/4146 ,  B82Y15/00 ,  H01L21/00 ,  Y10T29/4913 ,  Y10T137/218 ,  H01L29/0665

Abstract: According to the embodiment of the present invention, an ion field effect transistor having a heterogeneous triangular nanochannel includes a substrate, a polymer layer formed on the substrate and having a first flow path and a second flow path separated from the first flow path, and a gate electrode formed on the substrate and the polymer layer and touching the first and the second flow path. A heterogeneous triangular nanochannel connecting the first and the second flow path is formed between the gate electrode and the polymer layer.

Abstract translation: 根据本发明的实施例，具有异质三角形纳米通道的离子场效应晶体管包括基板，形成在基板上的聚合物层，并且具有与第一流路分离的第一流路和第二流路， 栅极形成在基板和聚合物层上并且接触第一和第二流动路径。 在栅电极和聚合物层之间形成连接第一和第二流路的异质三角形纳米通道。