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公开(公告)号：KR1020090117343A
公开(公告)日：2009-11-12
申请号：KR1020080043349
申请日：2008-05-09
Applicant: 포항공과대학교 산학협력단
CPC classification number: C03C17/06 , B82Y40/00 , C03C23/0065 , C03C23/007 , C03C2217/261 , C03C2218/154
Abstract: PURPOSE: A glass nanofabrication method using deposition of metal thin film is provided to adjust the depth of the metal thin film according to the thickness of metal thin film pattern, heat-treatment temperature, and voltage intensity. CONSTITUTION: A glass nanofabrication method using deposition of metal thin film comprises the following steps of: patterning a metal thin film on a glass substrate(10) and depositing the metal thin film; heating the glass substrate where the patterned metal thin film is deposited; forming an electric field between the metal thin film and glass substrate; and dipping the glass substrate in aqua regia or piranha cleaning solution for a predetermined time so as to etch the glass substrate with the metal thin film. The metal thin film is formed by a sputtering method, filament deposition, electron-beam deposition, RF power deposition, or flash deposition.
Abstract translation: 目的：提供使用金属薄膜沉积的玻璃纳米制造方法，以根据金属薄膜图案的厚度，热处理温度和电压强度来调节金属薄膜的深度。 构成：使用金属薄膜的沉积的玻璃纳米制造方法包括以下步骤：在玻璃基板（10）上图案化金属薄膜并沉积金属薄膜; 加热沉积图案化金属薄膜的玻璃基板; 在金属薄膜和玻璃基板之间形成电场; 并将玻璃基板浸渍在王水或食人鱼清洁溶液中预定的时间，以便用金属薄膜蚀刻玻璃基板。 金属薄膜通过溅射法，灯丝沉积，电子束沉积，RF功率沉积或闪蒸沉积形成。
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公开(公告)号：KR100682031B1
公开(公告)日：2007-02-12
申请号：KR1020050077305
申请日：2005-08-23
Applicant: 학교법인 포항공과대학교 , 포항공과대학교 산학협력단
Abstract: A glass fabrication method useful for mass production of glass products is provided to control working depth of the products based on heat treatment temperature and voltage to form electric field by forming a molecular substitution layer in the reusable bulk form in order to change molecular structure of glass crystals. The method includes the steps of: processing a molecular substitution layer(2) on a face opposite to a glass substrate(1); bringing the processed face of the molecular substitution layer into close contact with the glass substrate; molecule substituting crystal atoms of the glass substrate by crystal atoms of the molecular substitution layer; separating the molecular substitution layer from the glass substrate; and etching weak glass crystal structure of the glass substrate generated by the molecular substitution process. The molecular substitution layer is formed in bulk form and consists of metal or non-metal base possible to be substituted by the crystal atoms of the glass substrate. The glass substrate includes glass substrate containing borosilicate.
Abstract translation: 提供一种用于大规模生产玻璃产品的玻璃制造方法，以通过在可再用块体形式中形成分子取代层以基于热处理温度和电压来控制产品的工作深度以形成电场，从而改变玻璃的分子结构 晶体。 该方法包括以下步骤：在与玻璃基板（1）相对的面上处理分子取代层（2）; 使分子置换层的处理过的面与玻璃基板紧密接触; 用分子取代层的晶体原子分子取代玻璃基板的晶体原子; 将分子取代层与玻璃基板分离; 并且蚀刻通过分子置换过程产生的玻璃基板的弱玻璃晶体结构。 分子取代层以散装形式形成并且由可能被玻璃基板的晶体原子取代的金属或非金属碱组成。 玻璃基板包括含有硼硅酸盐的玻璃基板。
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公开(公告)号：KR100666502B1
公开(公告)日：2007-01-09
申请号：KR1020050064234
申请日：2005-07-15
Applicant: 학교법인 포항공과대학교 , 포항공과대학교 산학협력단
CPC classification number: C03C17/09 , B82Y40/00 , C03C23/0005 , C03C2217/252 , C03C2218/154
Abstract: A nano-glass processing method for forming nano-scale of structure is provided to early and conveniently produce complex three-dimensional structure in nano-scale by applying inter-molecular substitution between glass crystal atoms and metal atoms. The method includes the steps of: forming a molecular substitution layer by forming the molecular substitution layer on a glass substrate, which has crystal atom size larger than glass crystal size of the glass substrate and at least one of charge difference; patterning the molecular substitution layer to become symmetric to pattern to be formed on the glass substrate; substituting crystal atoms of the molecular substitution layer by crystal atoms of the glass substrate; removing the patterned molecular substitution layer from the glass substrate, which was caused by the substitution. The molecular substitution layer is made of metal film possible for the molecular substitution with the glass substrate.
Abstract translation: 提供纳米级结构的纳米玻璃加工方法，通过在玻璃晶体原子和金属原子之间进行分子间取代来提早纳入纳米级的复杂三维结构。 该方法包括以下步骤：通过在玻璃基板上形成分子取代层而形成分子取代层，该玻璃基板的晶体原子尺寸大于玻璃基板的玻璃晶体尺寸，并且具有至少一个电荷差; 将分子取代层图案化成与在玻璃基板上形成的图案对称; 用玻璃基板的晶体原子取代分子取代层的晶体原子; 从玻璃基板上除去由取代引起的图案化分子取代层。 分子取代层由金属膜制成，可能用玻璃基板进行分子取代。
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公开(公告)号：KR100973828B1
公开(公告)日：2010-08-03
申请号：KR1020080043349
申请日：2008-05-09
Applicant: 포항공과대학교 산학협력단
Abstract: 본 발명에 따른 유리 나노 가공 방법은, 유리 기판 위에 금속 박막을 패터닝(patterning)하여 증착시키는 단계; 상기 패터닝된 금속 박막이 증착된 유리 기판에 열을 가하는 단계; 상기 금속 박막과 상기 유리 기판 사이에 전기장을 형성하는 단계; 상기 금속 박막이 형성된 유리 기판을 왕수(aqua regia) 또는 피라냐 세정액(piranha cleaning solution)에 기 설정된 시간 동안 담가두어 금속 박막과 함께 유리 기판을 식각시키는 단계를 포함한다.
유리, 나노 가공, 철 박막, 분자 치환, 왕수
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