公开(公告)号：KR102073056B1

公开(公告)日：2020-02-04

申请号：KR1020130037072

申请日：2013-04-04

Applicant: 포항공과대학교 산학협력단

Inventor： 김동표 ,  코타가루칙차링가아바사바라주

IPC: B01J37/02 ,  B01J35/10 ,  B01J23/52 ,  B01J23/44

公开(公告)号：KR1020140099419A

公开(公告)日：2014-08-12

申请号：KR1020130037072

申请日：2013-04-04

Applicant: 포항공과대학교 산학협력단

Inventor： 김동표 ,  코타가루칙차링가아바사바라주

IPC: B01J37/02 ,  B01J35/10 ,  B01J23/52 ,  B01J23/44

Abstract: The present invention relates to a vertically aligned mesoporous silicate film position-selectively deposited with a metal from a single polymer precursor, and a strong catalytic application thereof. An innovative single precursor approach is reported for fabricating the vertically aligned mesoporous silicate thin film having high thermal and physical resistance on a large-scale Si wafer (2 x 3 cm^2). An organic-nonorganic block copolymer (polyethylene-ss-polyvinyl cyclic silazine: (BCP) PEO-ss-PVCSZ) having a disulfide bridge complicatedly designed and being chemically cleavable is newly composed as a single precursor for an oriented silicate nanopore film. A meso structure is directly formed on a substrate through a block division process connected to a solvent annealing self-assembly process and a simple hydrolysis conversion process from a polymer to a siliceous phase at room temperature.

Abstract translation: 本发明涉及一种垂直排列的介孔硅酸盐膜，其位置选择性地沉积有来自单一聚合物前体的金属，并且其强催化应用。 据报道，在大型Si晶片（2×3cm ^ 2）上制造具有高热和物理电阻的垂直取向的中孔硅酸盐薄膜的创新的单一前体方法。 具有复杂设计和可化学切割的二硫桥的有机 - 非有机嵌段共聚物（聚乙烯-β-聚乙烯基环状硅嗪（BCP）PEO-β-PVCSZ）被新构成为用于取向硅酸盐纳米孔膜的单一前体。 通过与溶剂退火自组装工艺连接的块分割工艺和在室温下从聚合物到硅质相的简单水解转化过程在衬底上直接形成内消旋结构。