Abstract:
PURPOSE: Provided are a polyimide sol-gel precursor, a void sol-gel monomer and a void organic-inorganic insulating low-dielectric substance prepared therefrom, which has high mechanic strength and lowered dielectric constant. CONSTITUTION: The polyimide sol-gel precursor having a triethoxysilane for a sol-gel process at a branch of polyimide is represented by the following formula (1). The polyimide sol-gel precursor having a triethoxysilane for a sol-gel process at a branch of adamantyl polyimide is represented by the following chemical formula (2) or (3). In the formulae (1), (2) and (3), X is a triethoxysilane containing an aromatic compound for a sol-gel process. The void sol-gel monomer is selected from compounds described as the formulae (5), (6), (7) and (8) in a description. The void organic-inorganic insulating low-dielectric substance is prepared by easily covalent bond with the void sol-gel monomer and is represented by the following formula (4).