외부 공진기형 링레이저를 이용한 고정밀도 링레이저 간섭계
    1.
    发明公开
    외부 공진기형 링레이저를 이용한 고정밀도 링레이저 간섭계 失效
    高精度环形激光干涉仪使用外部环形激光

    公开(公告)号:KR1020010002250A

    公开(公告)日:2001-01-15

    申请号:KR1019990021962

    申请日:1999-06-14

    CPC classification number: G01C19/66

    Abstract: PURPOSE: A high accuracy ring laser interferometer using an external cavity type ring laser is provided to high accurately measure by straining or offsetting the change of the applied voltage and output beam strength and change of frequency of a ring laser. CONSTITUTION: In an optical sensing device for being used in an interferometer measuring measured amount by using a ring laser, the optical sensing includes a ring laser cavity and at least one or more external reflex mirrors(187), the ring laser cavity includes a plurality of inner reflex mirrors(219,220,223,224) and two laser beams having equal wavelength and transmitting in opposite direction, the part of the opposite directional traveling beams is penetrated through the plurality of inner reflex mirrors, the external reflex mirror respectively selects one penetrated beam from the two inner reflex mirrors different from each other so that two penetrated beams are in opposite direction and reflects the selected beams for making backward traveling waves and injects the backward traveling waves into the ring laser cavity through the different inner reflex mirrors, and an optical path from two inner reflex mirrors to the corresponding external reflex mirrors is changeable according to the measured amount.

    Abstract translation: 目的:提供使用外腔型环形激光器的高精度环形激光干涉仪,通过应变或抵消施加电压的变化和输出光束强度和环形激光器的频率变化来高精度测量。 构成:在用于通过使用环形激光测量测量量的干涉仪中的光学感测装置中,光学感测包括环形激光腔和至少一个或多个外部反射镜(187),环形激光腔包括多个 内反射镜(219,220,223,224)和两个相等波长的激光束相反方向传播,相反的方向行进光束的一部分穿透多个内反射镜,外反射镜分别从两个反射镜中选出一个穿透光束 内部反射镜彼此不同,使得两个穿透的光束处于相反的方向并且反射所选择的光束以进行反向行波,并且通过不同的内反射镜将反向行波注入环形激光腔,并且从两个 根据t可以改变内部反射镜到相应的外部反射镜 他量量。

    외부 공진기형 링레이저를 이용한 고정밀도 링레이저 간섭계
    2.
    发明授权
    외부 공진기형 링레이저를 이용한 고정밀도 링레이저 간섭계 失效
    基于外部环形激光的高精度激光激光干涉仪

    公开(公告)号:KR100297228B1

    公开(公告)日:2001-09-22

    申请号:KR1019990021962

    申请日:1999-06-14

    CPC classification number: G01C19/66

    Abstract: 링레이저의반사경을통해링레이저내의두 반대방향진행빔의일부를출력시켜이것을외부반사경을이용하여후방진행파(back travelling wave)로만들어다시링레이저공진기내로주입시킴으로써록인존(lock-in zone)을넓게함과동시에외부반사경과링 레이저사이의거리, 즉광 경로의길이(optical path length)를피 측정량에의해조절함으로써달라지는두 반대방향진행파의빔 강도(intensity) 및위상변화(phase change)에따른간섭무늬(interference fringe)수의변화율(variation)을측정하여이를이용하여피 측정량을측정하는링레이저간섭계및 이를이용하는방법에관한것이다. 외부반사경과링 레이저사이에감쇄기를두어후방진행파의세기를외부에서조절가능하게함으로써, 링레이저를록인존 영역내에서만동작시키도록한다. 변위(displacement), 길이(length), 위치(position), 온도(temperature), 굴절율(refractive index), 압력(pressure) 등의여러가지물리량(physical quantity)이피 측정량이될 수가있다. 본발명의간섭계의출력은두 반대방향진행파의출력빔강도의합과차이그리고위상차이(phase difference)에의한간섭무늬의변화율이고, 이들의일부는부궤환(negative feedback)되어인가전압의변동및 기타외부영향에의한링레이저의출력빔강도및 주파수변화를억제또는상쇄시켜, 고정도측정을가능하게한다. 또한링레이저를록인존에서동작시키므로링레이저의미세움직임이측정량에미치는영향도최소화할수 있다.

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