公开(公告)号：KR1020100128778A

公开(公告)日：2010-12-08

申请号：KR1020090047382

申请日：2009-05-29

Applicant: 한국과학기술연구원

Inventor： 이중기 ,  조병원 ,  이화영 ,  이상득 ,  우주만 ,  장원영 ,  유경선

IPC: H01L21/02 ,  H01L21/205 ,  H01L21/3065

CPC classification number: H01L21/324 ,  H01L21/205 ,  H01L21/3065 ,  H01L22/12

Abstract: PURPOSE: A hybrid thermal destruction processes coupled with adsorptive enriched units for the removal of perfluorocompounds gases from semi-conductor production industry is provided to reduce the amount of the process energy by heat-dissolving the concentrated perfluorocompounds by incineration and plasma. CONSTITUTION: The fluorinated gas(S1) is adsorbed by the absorbent from the exhaust gas. The absorbed fluorinated gas is detached from the absorbent. The detached perfluorinated gas is removed by the thermal process. The absorbent is the compound of one or two kinds selected output the A1216 activated charcoal, the A836 activated charcoal, and the A1261 activated charcoal.

Abstract translation: 目的：提供混合热破坏过程与吸附富集单元相结合，用于从半导体生产工业中去除全氟化合物气体，以通过焚烧和等离子体热解浓缩的全氟化合物来减少工艺能量。 构成：氟化气体（S1）被吸收剂从废气吸附。 吸收的氟化气体与吸收剂分离。 分离的全氟化气体通过热处理除去。 吸收剂是一种或两种选择的化合物输出的A1216活性炭，A836活性炭和A1261活性炭。

公开(公告)号：KR101052064B1

公开(公告)日：2011-07-27

申请号：KR1020090047382

申请日：2009-05-29

Applicant: 한국과학기술연구원

Inventor： 이중기 ,  조병원 ,  이화영 ,  이상득 ,  우주만 ,  장원영 ,  유경선

IPC: H01L21/02 ,  H01L21/205 ,  H01L21/3065

Abstract: 본 발명은 반도체 혹은 함불소가스 생산공정에서 대량으로 배출되는 배기가스 중 희박농도로 존재하는 함불소가스를 경제적이면서도 효율적으로 분해하기 위한 공정기술에 관한 것으로, 배가스의 함불소가스를 탄소계 물질로 충진된 흡착/탈착탑을 이용하여 함불소가스를 배가스로부터 분리하고, 다시 흡착 함불소가스의 탈착을 유도하여 고농도의 함불소가스를 생성하고, 다시 플라즈마 혹은 소각과 같은 열분해장치로 이송하여 함불소가스를 99.99 % 이상 제거한다.
본 발명기술은 함불소가스가 함유된 폐가스를 효율적으로 분해하기 위해서 폐가스의 총 부피를 최대한으로 감소시켜, 농축된 함불소가스를 처리함으로서 열분해 과정에서 발생되는 2차 오염과 분해하는데 사용되는 전기, 메탄가스 및 수소와 같은 에너지사용을 최소화하여 함불소가스를 효과적으로 무해화하는 방법에 대한 것이다.
지구온난화가스, 함불소가스 흡착농축공정, 함불소가스 열분해공정, 반도체공정, CDM

Abstract translation: 本发明涉及一种在半导体或氟气生产过程中经济有效地分解大量排放的废气中贫瘠浓度的氟气的工艺技术， 使用来自废气的填充吸附/解吸塔中分离出的氟化气体，并且再吸收也导致氟气的解吸以产生氟化气体的高浓度，并且还重新转移到热解单元，诸如血浆或焚化氟 去除超过99.99％的气体。

公开(公告)号：KR1020020030507A

公开(公告)日：2002-04-25

申请号：KR1020000061354

申请日：2000-10-18

Applicant: 한국과학기술연구원

Inventor： 이중기 ,  정문조 ,  이재우 ,  박달근 ,  우주만 ,  유경선

IPC: B01D53/56

CPC classification number: B01D53/56 ,  B01D2251/21

Abstract: PURPOSE: By adding a specific amount of an anionic surfactant or anionic surfactant/nonionic surfactant in aqueous solution of carbamide £(NH2)2CO| employed in selective non-catalytic reduction of nitric oxides, it is possible to spray carbamide solution finer than use aqueous solution of carbamide alone, especially accelerate chemical decomposition of carbamide over a relatively low temperature range of less than 900°C. CONSTITUTION: In the selective non-catalytic reducing agent for reducing nitric oxides(NOx) containing aqueous solution of carbamide £(NH2)2CO| as main Ingredient, the selective non-catalytic reducing agent is added with a sulfone-based anionic surfactant in an amount of 0.1 to 20wt.%, wherein the sulfone-based anionic surfactant is selected from sodium alpha olefin sulfonate 0.1-10 wt.% and linear alkylbenzene sulfonic acid 0.1-5 wt.%. Further, the selective non-catalytic reducing agent is added with coconut diethanol amide nonionic surfactant in an amount of 0.1-20 wt.%.

Abstract translation: 目的：通过在尿素水溶液中加入特定量的阴离子表面活性剂或阴离子表面活性剂/非离子表面活性剂（NH 2）2CO | 在氮氧化物的选择性非催化还原中，可以单独使用比使用氨基脲水溶液更好的喷雾尿素溶液，特别是在低于900℃的相对较低的温度范围内加速了脲的化学分解。 构成：用于还原一氧化氮（NOx）的选择性非催化还原剂含有水溶液（NH 2）2CO | 作为主要成分，选择性非催化还原剂加入量为0.1-20重量％的砜类阴离子表面活性剂，其中砜类阴离子表面活性剂选自α-烯烃磺酸钠0.1-10重量％ 和直链烷基苯磺酸0.1-5重量％。 此外，选择性非催化还原剂加入0.1-20重量％的椰子二乙醇酰胺非离子表面活性剂。

公开(公告)号：KR100402051B1

公开(公告)日：2003-10-17

申请号：KR1020000061354

申请日：2000-10-18

Applicant: 한국과학기술연구원

Inventor： 이중기 ,  정문조 ,  이재우 ,  박달근 ,  우주만 ,  유경선

IPC: B01D53/56

Abstract: PURPOSE: By adding a specific amount of an anionic surfactant or anionic surfactant/nonionic surfactant in aqueous solution of carbamide £(NH2)2CO| employed in selective non-catalytic reduction of nitric oxides, it is possible to spray carbamide solution finer than use aqueous solution of carbamide alone, especially accelerate chemical decomposition of carbamide over a relatively low temperature range of less than 900°C. CONSTITUTION: In the selective non-catalytic reducing agent for reducing nitric oxides(NOx) containing aqueous solution of carbamide £(NH2)2CO| as main Ingredient, the selective non-catalytic reducing agent is added with a sulfone-based anionic surfactant in an amount of 0.1 to 20wt.%, wherein the sulfone-based anionic surfactant is selected from sodium alpha olefin sulfonate 0.1-10 wt.% and linear alkylbenzene sulfonic acid 0.1-5 wt.%. Further, the selective non-catalytic reducing agent is added with coconut diethanol amide nonionic surfactant in an amount of 0.1-20 wt.%.

Abstract translation: 目的：在尿素（NH2）2CO |水溶液中加入特定量的阴离子表面活性剂或阴离子表面活性剂/非离子表面活性剂， 用于选择性非催化还原一氧化氮时，可以喷射比单独使用尿素水溶液更细的尿素溶液，特别是在低于900℃的较低温度范围内加速尿素的化学分解。 本发明涉及一种用于还原含氮氧化物（NOx）的尿素水溶液的选择性非催化还原剂（NH2）2CO | 作为主要成分，选择性非催化还原剂中加入0.1至20重量％的基于砜的阴离子表面活性剂，其中砜基阴离子表面活性剂选自α-烯烃磺酸钠0.1-10重量％ 和直链烷基苯磺酸0.1-5重量％。 此外，选择性非催化还原剂中加入0.1-20重量％的椰子二乙醇酰胺非离子表面活性剂。