강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법
    2.
    发明授权
    강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법 失效
    具有改进强度和电气物理特性的陶瓷沉积船生产

    公开(公告)号:KR1019970010354B1

    公开(公告)日:1997-06-25

    申请号:KR1019950003400

    申请日:1995-02-22

    Abstract: The invention provides a TiB2-BN-AIN type ceramics deposited vessel. Its formula is wTiB2-xBN-yAIN-zWC in which w, x, y and z are 0.6 to 0.7, 0.15 to 0.20, 0.08 to 0.17 and 0.03 to 0.15 (w+x+y+z=1). The characteristics of process for producing the vessel are mixing TiB2-BN-AIN type ceramics material with WC, a sintering additive and sintering the mixture at a temperature of 1800-1950 C under a pressure in nitrogen atmosphere

    Abstract translation: 本发明提供了一种TiB2-BN-AIN型陶瓷沉积容器。 其中w,x,y和z分别为0.6〜0.7,0.15〜0.20,0.08〜0.17,0.03〜0.15(w + x + y + z = 1)的wTiB2-xBN-yAIN-zWC。 用于制造容器的方法的特征是将TiB2-BN-AIN型陶瓷材料与WC(烧结添加剂)混合,并在氮气气氛中在1800-1950℃的温度下烧结该混合物

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