公开(公告)号：KR1020080093310A

公开(公告)日：2008-10-21

申请号：KR1020070037098

申请日：2007-04-16

Applicant: 한국과학기술연구원

Inventor： 홍종인 ,  김태송 ,  윤대성

IPC: G02B6/10

Abstract: A high sensitive interferometer type sensor having a single mode optical waveguide and a manufacturing method thereof, a method for manufacturing the single mode optical waveguide are provided to easily couple the interferometer type sensor with an optical fiber or optical measuring equipment by forming an optical fiber coupling unit in a curved groove shape. A high sensitive interferometer type sensor(100) includes a single mode optical waveguide(110) and a sensing unit(120). The single mode optical waveguide has a core(112) and a cladding. The core has at least two interferometer arms and a minimum thickness of 1mum. The cladding surrounds the core. The sensing unit is formed by opening a part of the cladding to expose a part of at least one of the interferometer arms. The cladding is composed of upper and lower claddings(111,113). A self-assembled monolayer is formed at the exposed part of the interferometer arm.

Abstract translation: 一种具有单模光波导的高灵敏度干涉仪型传感器及其制造方法，提供了一种用于制造单模光波导的方法，以便通过形成光纤耦合器来容易地将干涉仪型传感器与光纤或光学测量设备耦合 单位为弯曲的凹槽形状。 高灵敏度干涉仪型传感器（100）包括单模光波导（110）和感测单元（120）。 单模光波导具有芯（112）和包层。 芯具有至少两个干涉仪臂，最小厚度为1um。 包层围绕着核心。 感测单元通过打开包壳的一部分以暴露干涉仪臂中的至少一个的一部分而形成。 包层由上和下包层（111,113）组成。 在干涉仪臂的暴露部分形成自组装单层。