Abstract:
PURPOSE: A manufacturing method of patterned octahedral gold nano-particle film using electronic beam irradiation, thermal process and washing and a patterned octahedron gold nano-particle film manufactured by the same are provided to effectively manufacture gold precursor - copolymer film. CONSTITUTION: A manufacturing method of patterned octahedral gold nano-particle film using electronic beam irradiation comprises the following steps: manufacturing a gold precursor - copolymer mixed solution by mixing gold precursors with copolymers; forming a composite film by coating the gold precursor-copolymer mixed solution on a substrate surface; forming a gold precursor - copolymer film which is patterned by selectively irradiating the gold precursor-copolymer film with electron beam and developing thereof; forming the octahedron gold nano-particle - copolymer film by heat-treating the patterned gold precursor - copolymer film; and manufacturing the octahedron gold nano-particle film by washing the patterned octahedron gold nano-particle copolymer film. [Reference numerals] (AA) Selective electromagnetic beam irradiation; (BB) Phenomenon; (CC) Patterned gold precursor-copolymer complex film; (DD) Heat treating; (EE) Copolymer film including octahedron gold nano-particle; (FF) Reactive ion etching; (GG) Carbon coated octahedron gold nano-particle film; (HH) Oxidation degradation; (II) Patterned octahedron gold nano-particle film
Abstract:
본발명에따르면선택적전자선조사를통하여대면적에패턴화된금 전구체필름을효율적으로생산할수 있고, 열분해를통하여고순도의패턴화된금 전구체필름을대면적및 고속생산할수 있다. 또한, 본발명에따른금 나노입자필름은전기적, 광학적특성이매우우수하므로, 미소량의생화학물질을감지할수 있는민감도가우수한생화학센서로활용될수 있을뿐만아니라, 단백질과같은특정생물학적작용기를인식하는바이오칩 (biochip)에도유용하게사용할수 있다.
Abstract:
PURPOSE: A method for manufacturing patterned gold nanoparticle films is provided to efficiently produce a gold precursor film which is patterned on a large area through selective electron irradiation and to produce the patterned gold precursor film of high purity with a fast rate through pyrolysis. CONSTITUTION: A method for manufacturing patterned gold nanoparticle films comprises the following steps: manufacturing a gold precursor solution; manufacturing a gold precursor mixture solution by mixing a photosensitive and cationic polymer solution and ethylene glycol with the gold precursor solution; forming a gold precursor film by coating the mixture solution on the surface of a substrate; forming a patterned gold precursor film through development after crosslinking the precursor materials by selectively irradiating electron on the gold precursor film; and forming the gold nanoparticle film through the pyrolysis of the patterned gold precursor film.