公开(公告)号：KR1020030091479A

公开(公告)日：2003-12-03

申请号：KR1020020029546

申请日：2002-05-28

Applicant: 한국과학기술원

Inventor： 윤준보 ,  이형규 ,  김지혁 ,  윤의식

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: PURPOSE: A micro mirror driver is provided to raise a micro mirror up to the desired height and to reduce an area of its structure. CONSTITUTION: An insulator layer is formed on a substrate(10), and two bottom pillars(110,120) are formed on the insulator layer separately each other. The first twisted bar(200) is formed to be laid over each top plane of the bottom pillars. The second twisted bar(300) is formed to be orthogonal with the first twisted bar. Four electrodes(410,420,430,440) are formed on the insulator layer to be located in the inside of an area formed by the crossing of the first and the second twisted bar. Two top pillars(510,520) are formed on a top plane of the second twisted bar so that each top plane of the top pillars is located higher than the top planes of the electrodes. And a micro mirror(600) is fixed and supported by the above top pillars.

Abstract translation: 目的：提供微镜驱动器以将微镜升高到所需的高度并减小其结构的面积。 构成：在基板（10）上形成绝缘体层，并且在绝缘体层上彼此分开形成两个底部柱（110,120）。 第一扭杆（200）被形成为放置在底柱的每个顶平面上。 第二扭杆（300）形成为与第一扭转杆成正交。 四个电极（410,420,430,440）形成在绝缘体层上，以位于通过第一和第二扭杆的交叉形成的区域的内部。 两个顶部柱（510,520）形成在第二扭转杆的顶部平面上，使得顶部柱的每个顶部平面位于比电极的顶部平面高的位置。 并且微反射镜（600）固定并由上述顶部支柱支撑。

公开(公告)号：KR100431581B1

公开(公告)日：2004-05-17

申请号：KR1020020029546

申请日：2002-05-28

Applicant: 한국과학기술원

Inventor： 윤준보 ,  이형규 ,  김지혁 ,  윤의식

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: Disclosed is a micromirror actuator that includes: a substrate provided with an insulating layer formed thereon; two lower columns spaced from each other by a designated distance, and formed on the insulating layer; a first torsion bar extending over upper surfaces of the lower columns; a second torsion bar formed so that the first and second torsion bars are orthogonal to each other; four electrodes, each disposed in four areas formed by the orthogonal crossing of the first and second torsion bars, formed on the insulating layer; two upper columns formed on an upper surface of the second torsion bar so that the upper surfaces of the upper columns are located at higher positions than the upper surfaces of the electrodes; and a micromirror located on the upper surfaces of the upper columns so that the micromirror is supported by the upper columns.

Abstract translation: 公开了一种微镜致动器，其包括：衬底，其上形成有绝缘层; 两个彼此间隔指定距离的下列，并形成在绝缘层上; 第一扭杆，其延伸越过下柱的上表面; 第二扭杆，其形成为使得第一扭杆和第二扭杆彼此正交; 四个电极，每个电极设置在由绝缘层上形成的由第一和第二扭杆的正交交叉形成的四个区域中; 两个上柱，其形成在第二扭杆的上表面上，使得上列的上表面位于比电极的上表面高的位置; 以及位于上列的上表面上的微镜，使得微镜由上列支撑。