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公开(公告)号：KR102016855B1
公开(公告)日：2019-10-21
申请号：KR1020180057543
申请日：2018-05-21
Applicant: 한국교통대학교산학협력단
IPC: H01L31/18 , H01L31/0224 , H01L31/0236
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