자기부상식 이송장치 및 이에 이용되는 영구자석 휠
    1.
    发明授权
    자기부상식 이송장치 및 이에 이용되는 영구자석 휠 失效
    磁力传感器类型传输装置和永磁铁轮用于其中

    公开(公告)号:KR100892565B1

    公开(公告)日:2009-04-09

    申请号:KR1020080080369

    申请日:2008-08-18

    Abstract: A magnetic levitation type transfer device and a permanent magnet wheel for performing the same are provided to transfer a conductive body into a desired direction by arbitrarily controlling a direction of thrust. A permanent magnet wheel(100) includes a coil part(120), a permanent magnet part, and a shielding plate(300). The permanent magnet part includes a rotation plate(200) and a plurality of permanent magnets(220). A plurality of permanent magnets is arranged on the rotation plate according to a columnar direction. N pole and S pole of a plurality of permanent magnets face upward. If a current is supplied to the coil part, the permanent magnet part is rotated by an interaction with the coil part. The shielding plate is positioned on a top of the permanent magnet part. An opening part(310) is formed in the shielding plate. A magnetic field generated in the permanent magnet part is partially opened in the opening part.

    Abstract translation: 提供磁悬浮式传送装置和用于执行磁悬浮式传送装置的永久磁轮,用于通过任意地控制推力方向将导电体转移到期望的方向。 永磁轮(100)包括线圈部分(120),永磁体部分和屏蔽板(300)。 永磁体部分包括旋转板(200)和多个永磁体(220)。 根据柱状方向,在旋转板上设置多个永久磁铁。 多个永磁体的N极和S极面朝上。 如果向线圈部分提供电流,则永磁体部分通过与线圈部分的相互作用而旋转。 屏蔽板位于永磁体部分的顶部。 在屏蔽板上形成开口部(310)。 在永磁体部分产生的磁场在开口部分部分地打开。

    비접촉 평면 스테이지 및 이의 제어방법
    2.
    发明授权
    비접촉 평면 스테이지 및 이의 제어방법 失效
    非接触式平面图及其控制方法

    公开(公告)号:KR100917499B1

    公开(公告)日:2009-09-16

    申请号:KR1020080088745

    申请日:2008-09-09

    CPC classification number: H01L21/68714

    Abstract: A non-contact planar stage and a control method thereof are provided to extend a driving area by enlarging a conductive plate. A first directional linear induction motor unit includes a plurality of linear induction motors arranged in parallel. A second directional linear induction motor unit includes a plurality of linear induction motors arranged in an orthogonal direction to the first directional linear induction motor unit. At least one of the linear induction motors is arranged to generate the thrust of the opposite direction of the other linear induction motors inside the same linear induction motor unit. Each linear induction motor includes a plurality of ferromagnetic cores and a coil wound around the ferromagnetic cores. A non-contact planar stage(100) is moved on the conductive plate with a ferromagnetic uneven part(300) by the magnetic force generated between the first directional linear induction motor unit, the second directional linear induction motor unit, and a conductive plate(310).

    Abstract translation: 提供非接触平面台及其控制方法,以通过放大导电板来扩展驱动区域。 第一方向线性感应电动机单元包括多个平行布置的线性感应电动机。 第二方向线性感应电动机单元包括沿与第一方向线性感应电动机单元正交的方向布置的多个线性感应电动机。 线性感应电动机中的至少一个被布置成在相同的线性感应电动机单元内产生其它线性感应电动机的相反方向的推力。 每个线性感应电动机包括多个铁磁芯和缠绕在铁磁芯上的线圈。 通过在第一方向线性感应电动机单元,第二方向线性感应电动机单元和导电板之间产生的磁力,非接触平面台(100)通过铁磁性不均匀部(300)在导电板上移动 310)。

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