公开(公告)号：KR101389048B1

公开(公告)日：2014-04-28

申请号：KR1020130012952

申请日：2013-02-05

Applicant: 한국산업기술대학교산학협력단

Inventor： 이성의 ,  이희철 ,  이소희

IPC: C03C15/00 ,  C03C17/06

CPC classification number: C03C17/09 ,  B82Y30/00 ,  C03C17/32 ,  C03C23/006

Abstract: The present invention relates to a method for forming fine patterns on a glass plate. The method for forming fine patterns includes a step of sequentially forming a metal layer and a resin layer on a glass plate, a step of patterning the resin layer through a nanoimprint process, a step of forming a metal oxide film by selectively oxidizing the metal layer under a plasma atmosphere including oxidizing gas using the patterned resin layer as a mask, and a step of etching the surface of the glass plate using the metal oxide film as a mask after removing the resin layer and the non-oxidized metal layer. The method improves the optical clarity of a glass plate by forming fine patterns on the surface of the glass plate. [Reference numerals] (AA) Start; (BB) Step of forming a metal layer on the surface of a glass plate; (CC) Step of forming a patterned resin layer on the metal layer through a nanoimprint process; (DD) Step of forming a metal oxide film by selectively oxidizing the metal layer and forming a patterned metal oxide film by removing the metal layer which is not oxidized with the resin layer; (EE) Step of etching the surface of the glass plate by applying the metal oxide film as a mask; (FF) Step of removing the metal oxide film; (GG) Step 100; (HH) Step 110; (II) Step 120; (JJ) Step 130; (KK) Step 140; (LL) End

Abstract translation: 本发明涉及一种在玻璃板上形成精细图案的方法。 形成精细图案的方法包括在玻璃板上依次形成金属层和树脂层的步骤，通过纳米压印法对树脂层进行图案化的步骤，通过选择性地氧化金属层形成金属氧化物膜的步骤 在使用图案化树脂层作为掩模的包括氧化气体的等离子体气氛下，在除去树脂层和未氧化金属层之后，使用金属氧化物膜作为掩模来蚀刻玻璃板的表面的步骤。 该方法通过在玻璃板的表面上形成精细图案来提高玻璃板的光学透明度。 （附图标记）（AA）开始; （BB）在玻璃板的表面形成金属层的工序; （CC）通过纳米压印法在金属层上形成图案化树脂层的步骤; （DD）通过选择性地氧化金属层并通过除去未被树脂层氧化的金属层形成图案化的金属氧化物膜来形成金属氧化物膜的步骤; （EE）通过将金属氧化物膜作为掩模来蚀刻玻璃板的表面的步骤; （FF）去除金属氧化物膜的步骤; （GG）步骤100; （HH）步骤110; （II）步骤120; （JJ）步骤130; （KK）步骤140; （LL）结束