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公开(公告)号：KR1020110061271A
公开(公告)日：2011-06-09
申请号：KR1020090117870
申请日：2009-12-01
Applicant: 에이엠테크놀로지 주식회사 , 한국산업기술대학교산학협력단
IPC: H01L21/304
Abstract: PURPOSE: A plane grinding device for a wafer is provided to reduce process time by simultaneously performing a rough cut and a finish cut. CONSTITUTION: A grinding wheel(110) is fixed to the outer surface of an arbor(100). Each end of the arbor is rotatably installed on an arbor base(200). An arbor rotation motor(300) is connected to the arbor and rotates the arbor. A working table(400) is installed on the lower side of the arbor base. A table rotation motor(500) is connected to the table and rotates the table.
Abstract translation: 目的：提供一种用于晶片的平面磨削装置，通过同时进行粗切削和精切削来缩短加工时间。 构成：砂轮（110）固定在心轴（100）的外表面上。 心轴的每个端部可旋转地安装在心轴基座（200）上。 心轴旋转马达（300）连接到心轴并使心轴旋转。 工作台（400）安装在心轴基座的下侧。 工作台旋转马达（500）连接到工作台并旋转工作台。
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公开(公告)号：KR100795165B1
公开(公告)日：2008-01-16
申请号：KR1020060122982
申请日：2006-12-06
Applicant: 한국산업기술대학교산학협력단 , 에이엠테크놀로지 주식회사
CPC classification number: B24B13/06 , B24B49/006
Abstract: A shape division and interpolation control method for a grinding system of a micro lens is provided to connect lens design data directly to processing by directly inputting the function of a lens shape and a tool path to a control unit. A tool path divided by a user calculates an ideal speed and acceleration for each divided plane by a step of generating an ideal time-sharing motion profile or a step of generating an ideal position-sharing motion profile, and performs interpolation control by correcting a speed and acceleration through a correction speed calculation step in an actual processing.
Abstract translation: 提供了一种用于微透镜研磨系统的形状分割和插值控制方法，用于通过直接将透镜形状和工具路径的功能直接输入到控制单元将透镜设计数据直接连接到处理。 由用户划分的刀具路径通过产生理想的分时运动曲线的步骤或产生理想的位置共享运动曲线的步骤来计算每个划分的平面的理想速度和加速度，并且通过校正速度来执行内插控制 以及通过实际处理中的校正速度计算步骤的加速度。
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公开(公告)号：KR101097501B1
公开(公告)日：2011-12-22
申请号：KR1020090117870
申请日：2009-12-01
Applicant: 에이엠테크놀로지 주식회사 , 한국산업기술대학교산학협력단
IPC: H01L21/304
Abstract: 이와같은웨이퍼용평면연삭장치는, 연삭휠과작업대상에고정설치되는연삭대상물이상호수직상태로배치된상태에서, 아버베이스및 작업대가횡축이동부에의해상호수직되는횡방향으로이동하며연삭작업이이루어지게된다. 따라서, 연삭휠이연삭대상물과선접촉하며원주방향으로연삭가공이이루어지는바, 가공부하가적어지면서가공속도는빨라지게된다.
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公开(公告)号：KR100765491B1
公开(公告)日：2007-10-09
申请号：KR1020060077307
申请日：2006-08-16
Applicant: 에이엠테크놀로지 주식회사
IPC: H01L21/68 , H01L21/027
CPC classification number: H01L21/681 , G03F7/70491 , G03F7/705 , G03F9/7003 , G03F9/7019 , G03F9/7088
Abstract: A method for automatically aligning a wafer is provided to improve the stability and reliability of alignment by using transform equations of matrix and coordinates. An align error is measured to align a reference pattern and a wafer pattern mounted in a wafer measuring step(S440). A horizontal transform matrix and a translation transform matrix are calculated according to the calculated align error, and a correcting value of the pattern is determined by using coordinates transform of the matrix(S450). A wafer is aligned by utilizing the determined correcting value(S460). The above steps are repeated so that the align error of the wafer satisfies the allowable range(S470,S480).
Abstract translation: 提供了一种自动对准晶片的方法，通过使用矩阵和坐标的变换方程来提高对准的稳定性和可靠性。 测量对准误差以对准参考图案和安装在晶片测量步骤中的晶片图案（S440）。 根据计算的对准误差计算水平变换矩阵和平移变换矩阵，并通过使用矩阵的坐标变换来确定图案的校正值（S450）。 通过利用所确定的校正值来对准晶片（S460）。 重复上述步骤，使得晶片的对准误差满足容许范围（S470，S480）。
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公开(公告)号：KR100804729B1
公开(公告)日：2008-02-19
申请号：KR1020060083662
申请日：2006-08-31
Applicant: 에이엠테크놀로지 주식회사
CPC classification number: H01L21/67092
Abstract: A dual dicing apparatus is provided to reduce a damage of the apparatus and to increase mobility of the spindles by preventing interference of a blade. A first spindle(110) rotates a first rotation shaft(111), and a first blade(112) formed in a disc shape for cutting a specimen is connected to the first rotation shaft. A second spindle(120) rotates a second rotation shaft(121) protruding in a direction opposite to a protruding direction of the first rotation shaft, and a second blade(122) is connected to the second rotation shaft. The first rotation shaft is disposed in parallel with the second rotation shaft, and the first and second rotation shafts are moved by a transfer device. The first and second blades are rotated in an opposite direction.
Abstract translation: 提供了一种双切割装置，以减少装置的损坏并通过防止叶片的干扰来增加主轴的移动性。 第一主轴（110）旋转第一旋转轴（111），并且形成为用于切割试样的圆盘形状的第一叶片（112）连接到第一旋转轴。 第二主轴（120）旋转沿与第一旋转轴的突出方向相反的方向突出的第二旋转轴（121），并且第二叶片（122）连接到第二旋转轴。 第一旋转轴与第二旋转轴平行设置，第一旋转轴和第二旋转轴由转印装置移动。 第一和第二叶片沿相反方向旋转。
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Patent Agency Ranking
公开(公告)号：KR100805524B1
公开(公告)日：2008-02-20
申请号：KR1020060056608
申请日：2006-06-23
Applicant: 에이엠테크놀로지 주식회사
Abstract: 본 발명은 틸팅(tilting) 축 또는 경사축이 없는 비구면 연삭/연마 장치와 가공 방법에 관한 것으로서, 구체적으로는 틸팅축이 없는 직선 이송계만으로 비구면 연삭/연마 장치를 구성하는 방법과 공구 경로 생성방법을 그 특징으로 한다.
이와 같은 본 발명의 장점은 하드웨어적으로는 공구의 접촉각을 주는 틸팅축을 없앨 수 있으므로 제어요소와 장치의 단가를 낮추고, 소프트웨어적으로는 가공 속도와 위치에 따라 공구 경로의 분할 간격을 자유롭게 조절할 수 있으므로 가공 정밀도를 높일 수 있다는 것이다.
비구면 연마, 곡면 연삭, 광학, 렌즈, 다축-
公开(公告)号：KR1020070121858A
公开(公告)日：2007-12-28
申请号：KR1020060056608
申请日：2006-06-23
Applicant: 에이엠테크놀로지 주식회사
Abstract: An apparatus and a method for grinding and polishing a work without a tilting shaft or an inclined shaft are provided to reduce costs for the apparatus by removing the tilting shaft and to improve processing precision by controlling division interval of tool route according to processing speed and position. An apparatus for grinding and polishing a work without a tilting shaft or an inclined shaft comprises a horizontal shaft(308), a vertical shaft(305), a perpendicular shaft(306), a work spindle(304), a tool, and a tool spindle(302). The horizontal shaft moves a work(303) horizontally about a tool(301) in an aspherical radial direction. The vertical shaft moves the tool vertically to the work in an aspherical radial direction. The perpendicular shaft converts relative position between the work and the tool into a straight movement in a direction where the horizontal shaft is normal to the vertical shaft in a three dimension. The work spindle rotates the work in an aspherical radial direction. The tool spindle rotates the tool toward the aspherical radial direction. The tool contacts with the surface of the work to remove uneven parts formed on the surface of the work. A contact point of the tool has one arch shape.
Abstract translation: 提供一种用于研磨和抛光没有倾斜轴或倾斜轴的工件的装置和方法，以通过移除倾斜轴来降低装置的成本，并且通过根据处理速度和位置控制工具路线的分割间隔来提高加工精度 。 一种用于在没有倾斜轴或倾斜轴的情况下研磨和抛光工件的装置包括水平轴（308），垂直轴（305），垂直轴（306），工作轴（304），工具和 刀具主轴（302）。 水平轴在工件（301）的水平方向上以非球面径向方向移动工件（303）。 垂直轴以非球面径向方向将工具垂直移动到工件。 垂直轴将作业和工具之间的相对位置在水平轴垂直于垂直轴的方向上以三维方式成直线运动。 工作主轴在非球面径向旋转工件。 刀具主轴将刀具朝非球面径向旋转。 工具与工件的表面接触，以去除工件表面上形成的不均匀部分。 工具的接触点有一个拱形。
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公开(公告)号：KR1020180002342A
公开(公告)日：2018-01-08
申请号：KR1020160081743
申请日：2016-06-29
Applicant: 한국산업기술대학교산학협력단 , (주)에스제이엔
CPC classification number: B24B53/08 , B24B53/005 , B24B53/12
Abstract: 일실시예에따른연마휠 드레싱장치는, 상기연마휠의표면에서일부와연마휠의일 측과접촉가능하도록배치된드레싱스톤; 상기드레싱스톤에연결되어상기드레싱스톤을회전시키는구동부; 상기구동부에연결되어, 상기드레싱스톤을상기연마휠에대하여이송시키는이송부; 및상기이송부에연결되어, 상기드레싱스톤에의해상기연마휠에가해지는압력을측정하는압력측정부;를포함하고, 상기구동부의구동축은상기연마휠의수평축과나란히이격배치되어, 상기연마휠의표면에서나머지일부는상기드레싱스톤과비접촉하며, 상기압력측정부에서측정된압력데이터에의해상기이송부에서이송방향또는이송거리가실시간으로제어될수 있다.
Abstract translation: 根据该敷料装置的一个实施例中砂轮，设置在所述砂轮的表面上的敷料石被抵接部件和砂轮的一侧; 驱动单元，连接到所述修整石以旋转所述修整石; 传送部分，连接到驱动部分，用于将修整石转移到抛光轮; 并且它被连接到sanggiyi发送，由敷料石压力测量单元，其测量一个成为压力是在砂轮上;设置驱动轴隔开平行于驱动单元的砂轮的水平轴，以及包括，在砂轮上 在表面的其余部分是敷料石和非接触，并且在运输或输送距离的从由压力测量部件测量的压力数据传递sanggiyi方向能够实时地控制。
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公开(公告)号：KR101574712B1
公开(公告)日：2015-12-04
申请号：KR1020140013051
申请日：2014-02-05
Applicant: 한국산업기술대학교산학협력단 , 주식회사 현암
Abstract: 본발명은가로등주와전신주의기초블럭제조용거푸집의내부를청소하는청소장치에관한것으로, 상하로움직이며거푸집의내부를청소하는이동부;와상기이동부를상하로이동시키는구동부를포함하며, 상기이동부는, 상기구동부에의해서상하로이동하는이동체; 상기이동체의외부에위치하며거푸집의내부를청소하는하나이상의청소판; 및상기이동체와상기청소판의간격을조절하여상기청소판이거푸집의내부에밀착되도록조절하는간격조절장치를포함하는것을특징으로한다. 본발명의청소장치는, 구동부에의해서상하로움직이는이동체의외부에청소판을위치시키되, 이동체와청소판사이의간격을조절하는간격조절장치를구비함으로써, 청소판이거푸집의내면에밀착하여청소효율이매우뛰어나다.
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公开(公告)号：KR1020120136679A
公开(公告)日：2012-12-20
申请号：KR1020110055758
申请日：2011-06-09
Applicant: 한국산업기술대학교산학협력단 , 주식회사 유압사랑
Abstract: PURPOSE: A priority spool valve with a check orifice function is provided to stably maintain the handling of a steering wheel during the operation of a work device. CONSTITUTION: A priority spool valve with a check orifice function comprises an input port(11), an output port(12), a housing(10), a first chamber(21), a first cover(20), a second cap(34), and a second cover. Working fluid flows into and out from a control device for a vehicle through the input port. The working fluid supplied by a pump flows in and out through the output port. A working passage(13) in which the working fluid flows is formed in the housing. The first chamber accommodates the working fluid supplied through the input port. A spool, which surrounds the outer periphery of a return spring of which one end is supported inside the first chamber, is formed in the first cover The second cap is attached to one end of the spool and has a second receiving groove at a predetermined depth in one end thereof.
Abstract translation: 目的：提供具有检查孔功能的优先滑阀，以在工作装置的操作期间稳定地维持方向盘的操纵。 构成：具有检查孔功能的优先滑阀包括输入端口（11），输出端口（12），壳体（10），第一室（21），第一盖（20），第二盖 34）和第二盖。 工作流体通过输入口流入和流出用于车辆的控制装置。 由泵供应的工作流体通过输出端口流入和流出。 工作流体在其中流动的工作通道（13）形成在壳体中。 第一个室容纳通过输入端口供应的工作流体。 在第一盖中形成有围绕其一端被支撑在第一室内的复位弹簧的外周的卷轴，第二盖附接到卷轴的一端并且具有预定深度的第二容纳槽 在其一端。
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