公开(公告)号：KR100804686B1

公开(公告)日：2008-02-18

申请号：KR1020060116558

申请日：2006-11-23

Applicant: 한국에너지기술연구원

Inventor： 이대근 ,  최경빈 ,  동상근 ,  고창복 ,  정정열 ,  곽호영

IPC: F04B43/04

Abstract: A bubble-powered micro pump is provided to form a triple structure to obtain large flux with low power, observe bubble movement in a chamber to control bubbles in the optimum condition to obtain desired flux, and remove a mechanical driving part to secure long-term reliability. A first silicon wafer layer is a mark layer, having a groove formed on a top side to interpose a micro heater(21). A second silicon wafer layer is accumulated on the first silicon wafer layer, having a passage(31) in a direction of crossing the micro heater. A glass wafer layer has a power supply path connected with both ends of the micro heater to receive power through grounding, a fluid inlet(42) and a fluid exhaust port(43) connected with both ends of the passage.

Abstract translation: 提供气泡微型泵以形成三重结构以获得具有低功率的大通量，观察室中的气泡运动以在最佳条件下控制气泡以获得期望的通量，并且去除机械驱动部件以确保长期 可靠性。 第一硅晶片层是标记层，在顶侧形成有插入微加热器（21）的凹槽。 第二硅晶片层在第一硅晶片层上积累，在与微加热器交叉的方向上具有通道（31）。 玻璃晶片层具有与微加热器的两端连接以通过接地来接收电力的电源路径，与通道的两端连接的流体入口（42）和流体排出口（43）。