公开(公告)号：KR101133099B1

公开(公告)日：2012-04-04

申请号：KR1020110006741

申请日：2011-01-24

Applicant: 한국에너지기술연구원

Inventor： 한인섭 ,  우상국 ,  서두원 ,  김세영 ,  홍기석 ,  유지행 ,  김선동 ,  조철희 ,  김수찬

IPC: B01D69/04 ,  B01D71/02 ,  B01D69/02 ,  C04B35/10

CPC classification number: C01B3/503 ,  B01D67/0048 ,  B01D71/022 ,  B01D2256/16

Abstract: PURPOSE: A method for manufacturing a hydrogen separating membrane is provide to shorten times required for measuring transmittance and the amount of expensive gas used by measuring the transmittance without filling gas into a high temperature vacuum furnace. CONSTITUTION: Alumina sol is coated on a porous alumina tube(25). The coated alumina sol is dried and thermally treated. One side of the thermally treated alumina tube is sealed. Another side of the alumina tube is sealed and bonded with a dense porous alumina tube. The dense porous alumina tube is mounted on a high temperature vacuum furnace(10). The inside of the alumina tube is injected with oxygen gas, and the outside of the alumina tube is injected with silicon raw materials. A silicon oxide film is deposited on the porous alumina tube.

Abstract translation: 目的：制造氢分离膜的方法是缩短通过测量透射率而测量透光率所需的昂贵气体所需的时间，而不会将气体填充到高温真空炉中。 构成：将氧化铝溶胶涂覆在多孔氧化铝管（25）上。 将涂覆的氧化铝溶胶干燥并热处理。 热处理的氧化铝管的一侧被密封。 氧化铝管的另一侧被密封并用致密的多孔氧化铝管粘合。 密实的多孔氧化铝管安装在高温真空炉（10）上。 氧化铝管的内部注入氧气，氧化铝管的外部注入硅原料。 氧化硅膜沉积在多孔氧化铝管上。