公开(公告)号：KR100660924B1

公开(公告)日：2006-12-26

申请号：KR1020050121583

申请日：2005-12-12

Applicant: 한국전기연구원

Inventor： 김인성 ,  송재성 ,  민복기 ,  김원정 ,  정준기 ,  김철진

IPC: H01B3/10 ,  H01L21/42

Abstract: Provided are an oxide which is improved in tunability, is excellent in surface characteristics and can be used as a material for a high frequency device, its preparation method, and its preparation apparatus. The oxide comprises a ferroelectric material whose physical properties are changed by the asymmetrical heating by collecting the light spreading at the halogen lamp of an asymmetric heating part to concentrate it on the surface of an oxide thick film. Preferably the ferroelectric material is a compound comprising at least one selected from the group consisting of BaTiO3, SrTiO3, and (Sr_x Ba_(1-x))TiO3. The apparatus comprises a ferroelectric material; and an asymmetric heating part(100).

Abstract translation: 本发明提供调谐性提高，表面特性优异，可用作高频器件的材料及其制备方法和制备装置的氧化物。 该氧化物包括铁电材料，其物理性质通过收集非对称加热部件在卤素灯上散布的光而集中在氧化物厚膜表面上的非对称加热而改变。 优选地，铁电材料是包含选自BaTiO 3，SrTiO 3和（Sr_xBax（1-x））TiO 3中的至少一种的化合物。 该设备包括铁电材料; 和不对称加热部分（100）。