公开(公告)号：KR1020080052296A

公开(公告)日：2008-06-11

申请号：KR1020070083835

申请日：2007-08-21

Applicant: 한국전자통신연구원

Inventor： 이대식 ,  맹성렬 ,  뤄잭 ,  밀른빌

IPC: B81B7/00 ,  B81C1/00

CPC classification number: F04B19/006 ,  B01L3/502707 ,  B01L3/50273 ,  B01L2300/0816 ,  B01L2400/0439 ,  B01L2400/0496 ,  F04F7/00 ,  Y10T29/42 ,  Y10T137/86027

Abstract: A microfluidic transport device and a manufacturing method thereof are provided to enable mass production at low cost by using commercialized semiconductor manufacturing technology based on silicone. A microfluidic transport device comprises a substrate(101), a piezoelectric film(102), an IDT(Inter Digitated Transducer) electrode(103) and a fluid path(105). The piezoelectric film is formed on the upper part of the substrate. The IDT electrode for energy conversion is formed on the piezoelectric film so as to generate surface elastic wave. The fluid path is formed on the piezoelectric film.

Abstract translation: 提供了一种微流体输送装置及其制造方法，其通过使用基于有机硅的商业化的半导体制造技术以低成本进行批量生产。 微流体输送装置包括基底（101），压电薄膜（102），IDT（Inter Digitated Transducer）电极和流体通路。 压电膜形成在基板的上部。 用于能量转换的IDT电极形成在压电膜上，以产生表面弹性波。 流体路径形成在压电膜上。