위상천이격자를 이용한 영사식 모아레법 및 시스템
    1.
    发明授权
    위상천이격자를 이용한 영사식 모아레법 및 시스템 失效
    相移图像投影胶卷和系统

    公开(公告)号:KR100269267B1

    公开(公告)日:2000-10-16

    申请号:KR1019970072162

    申请日:1997-12-23

    Abstract: PURPOSE: A method for projection type moire using a phase transition grating and a system for the same are provided to improve measuring resolvability by applying a phase transition method to a projection type moire. CONSTITUTION: A projection grating(30) and a reference grating(31) are used as one couple. A relative distance between the projection grating(30) and the reference grating(31) is set up. Gratings of n couples are formed on one quartz glass by using a semiconductor lithography method. A phase transition grating(40) is manufactured by forming grating of n couples. The phase transition is obtained by using the phase transition grating(40).

    Abstract translation: 目的:提供一种使用相变光栅的投射型莫尔条纹及其系统,以通过将相变法应用于投射型波纹来提高测量可分辨性。 构成:使用投影光栅(30)和参考光栅(31)作为一对。 设置投影光栅(30)和参考光栅(31)之间的相对距离。 通过使用半导体光刻方法,在一个石英玻璃上形成n个对的格栅。 通过形成n对的光栅来制造相变光栅(40)。 通过使用相变光栅(40)获得相变。

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