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公开(公告)号：KR101991120B1
公开(公告)日：2019-06-19
申请号：KR1020190065568
申请日：2019-06-03
Applicant: 한림대학교 산학협력단
IPC: G01N27/02 , G01D21/02 , H01L21/02 , H01L21/108
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