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公开(公告)号：KR101639668B1
公开(公告)日：2016-07-14
申请号：KR1020110082341
申请日：2011-08-18
Applicant: 한화테크윈 주식회사
Inventor： 구보타히데토시
Abstract: 본발명은광학기기의해상력계측방법에관한것으로, 해상력을측정하고자하는테스트챠트중 임의의타겟영역으로부터각도를검출하는단계; 상기검출된각도데이터를비등간격으로오버샘플링하는단계; 상기오버샘플링된데이터를필터링하면서리샘플링하여등간격데이터로산출하는단계; 상기등간격데이터의 1차차분을구하는단계; 상기 1차차분된데이터를푸리에변환을통하여주파수강도와위상을산출하는단계; 및상기산출된강도데이터를표준화하는단계를포함한다. 본발명에따르면, 독자규격이아닌일반규격으로단순히변화및 비교가능한광학기기의해상력측정방법을확보할 수있고, 계측정밀도를향상시킬수 있으며, 측정환경에대한로버스트성을확보할수 있다.
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公开(公告)号：KR1020130020001A
公开(公告)日：2013-02-27
申请号：KR1020110082341
申请日：2011-08-18
Applicant: 한화테크윈 주식회사
Inventor： 구보타히데토시
CPC classification number: G01J9/00 , G01J2009/004
Abstract: PURPOSE: A method for measuring the resolution of an optical device is provided to improve measuring accuracy and to obtain robust properties with respect to a measurement environment. CONSTITUTION: A method for measuring the resolution of an optical device is as follows. An angle is detected from an arbitrary target area of a test chart desired to measure the resolution(210). The detected angle data is oversampled at an unequal space(220). The oversampled data is resampled while filtering the same so that an equal space data is obtained(230). A primary difference of the equal space data is obtained(240). The intensity and a phase of frequencies are obtained by performing Fourier transformation with respect to the obtained primary difference data(250). The obtained intensity data is standardized(270). [Reference numerals] (210) Detecting an angle; (220) Oversampling; (230) Resampling while filtering; (240) Primary difference; (260) Resampling while filtering; (270) Standardizing; (AA) Start; (BB) End
Abstract translation: 目的：提供一种测量光学器件分辨率的方法，以提高测量精度并获得关于测量环境的鲁棒性能。 构成：用于测量光学装置的分辨率的方法如下。 从期望测量分辨率的测试图表的任意目标区域检测角度（210）。 检测到的角度数据在不等的空间（220）被过采样。 对过采样数据进行重新采样，同时对其进行滤波，以获得相等的空间数据（230）。 获得相等空间数据的主要差异（240）。 频率的强度和相位通过相对于获得的主差分数据执行傅里叶变换来获得（250）。 获得的强度数据被标准化（270）。 （附图标记）（210）检测角度; （220）过采样; （230）过滤时重采样; （240）主要差异; （260）过滤时重采样; （270）标准化; （AA）开始; （BB）结束
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