公开(公告)号：KR1020090104678A

公开(公告)日：2009-10-06

申请号：KR1020090025242

申请日：2009-03-25

Applicant: 히다찌긴조꾸가부시끼가이사

Inventor： 고토타카오

IPC: H01L21/205 ,  H01L21/02 ,  H01L21/66

CPC classification number: G05D7/0635 ,  Y10T137/0324

Abstract: PURPOSE: A flow control device, a method for inspecting the same, and a flow control method are provided to compensate flow rate of a flow channel when a difference, which is not ignorable, in relation to setting a flow rate. CONSTITUTION: A flow control device is composed of a flux detection unit(5), a flow control valve unit(7), and a control unit(8). The flux detection unit detects a flow rate through the flow channel(4). The flow control valve unit is installed in the flow channel, and the flow control valve unit controls the flow rate by changing the degree of valve opening by the valve operation control information. The control unit receives at least one kind of flow setting of the at least from an external system(9).

Abstract translation: 目的：提供一种流量控制装置，其检查方法和流量控制方法，用于当相对于设定流量而不是可忽略的差异时，补偿流路的流量。 构成：流量控制装置由通量检测单元（5），流量控制阀单元（7）和控制单元（8）组成。 通量检测单元检测通过流路（4）的流量。 流量控制阀单元安装在流路中，流量控制阀单元通过阀操作控制信息改变阀开度来控制流量。 控制单元至少从外部系统（9）接收至少一种流量设定。

公开(公告)号：KR101110098B1

公开(公告)日：2012-03-08

申请号：KR1020090025242

申请日：2009-03-25

Applicant: 히다찌긴조꾸가부시끼가이사

Inventor： 고토타카오

IPC: H01L21/205 ,  H01L21/02 ,  H01L21/66

CPC classification number: G05D7/0635 ,  Y10T137/0324

Abstract: 유로(4)의유량을유량설정치가되도록유량을제어하고있을때에, 프로세스가스의유량검출치와, 압력검출치와, 유량제어밸브기구(7)에출력한밸브구동제어정보로구성되는검정샘플링정보의소정수를수집하여이 유량설정치와관련지어기억한다. 그리고, 검정샘플링정보로서기억된소정수의유량검출치와밸브구동제어정보에대하여, 그관련을나타내는관련계수(A)를순차적으로구하고, 이관련계수(A)의값이미리설정한역치의범위를넘고있으면, 새롭게입력한유량검출치에기초하여구하여밸브구동제어정보와, 미리검정처리용으로등록한밸브특성정보테이블(K1)을참조하여구한기준이되는밸브구동제어정보와의차이량을구하고, 이차이량을검정정보로하고있다.