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公开(公告)号：US09217920B2
公开(公告)日：2015-12-22
申请号：US14409162
申请日：2013-08-06
Applicant: 3M INNOVATIVE PROPERTIES COMPANY
Inventor： Douglas C. Fall , Zai-Ming Qiu
IPC: G03F7/027 , G03F7/075 , G03F7/039 , G03F7/20 , C08G18/28 , C08G18/79 , B23K35/24 , G03F7/004 , H05K3/28 , B23K35/36 , B23K35/365 , H05K3/34
CPC classification number: G03F7/0757 , B23K35/24 , B23K35/3612 , B23K35/3613 , B23K35/365 , C08G18/2825 , C08G18/2885 , C08G18/792 , G03F7/0046 , G03F7/027 , G03F7/039 , G03F7/0755 , G03F7/0758 , G03F7/20 , H05K3/287 , H05K3/3452
Abstract: A photocurable composition comprising a photoresist component, and a perfluoropolyether silane is disclosed. The composition enables easier release of phototool from a photoresist.
Abstract translation: 公开了包含光致抗蚀剂组分和全氟聚醚硅烷的可光固化组合物。 该组合物能够更容易地从光致抗蚀剂中释放光固醇。
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公开(公告)号：US20150248055A1
公开(公告)日：2015-09-03
申请号：US14409162
申请日：2013-08-06
Applicant: 3M INNOVATIVE PROPERTIES COMPANY
Inventor： Douglas C. Fall , Zai-Ming Qiu
IPC: G03F7/075
CPC classification number: G03F7/0757 , B23K35/24 , B23K35/3612 , B23K35/3613 , B23K35/365 , C08G18/2825 , C08G18/2885 , C08G18/792 , G03F7/0046 , G03F7/027 , G03F7/039 , G03F7/0755 , G03F7/0758 , G03F7/20 , H05K3/287 , H05K3/3452
Abstract: A photocurable composition comprising a photoresist component, and a perfluoropolyether silane is disclosed. The composition enables easier release of phototool from a photoresist.
Abstract translation: 公开了包含光致抗蚀剂组分和全氟聚醚硅烷的可光固化组合物。 该组合物能够更容易地从光致抗蚀剂中释放光固醇。
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公开(公告)号：US08883402B2
公开(公告)日：2014-11-11
申请号：US13921763
申请日：2013-06-19
Applicant: 3M Innovative Properties Company
Inventor： Douglas C. Fall , Zai-Ming Qiu
CPC classification number: G03F7/027 , C08G18/2825 , C08G18/2885 , C08G18/673 , C08G18/7831 , C08G18/792 , G03F7/0046 , G03F7/035 , G03F7/039 , G03F7/09 , Y10T428/24802
Abstract: A photocurable composition comprising a photoresist component, and an ethylenically unsaturated perfluoropolyether is disclosed. The composition enables easier release of phototool from a photoresist.
Abstract translation: 公开了包含光致抗蚀剂组分和烯属不饱和全氟聚醚的光固化组合物。 该组合物能够更容易地从光致抗蚀剂中释放光固醇。
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公开(公告)号：US20140044932A1
公开(公告)日：2014-02-13
申请号：US13921763
申请日：2013-06-19
Applicant: 3M INNOVATIVE PROPERTIES COMPANY
Inventor： Douglas C. Fall , Zai-Ming Qiu
CPC classification number: G03F7/027 , C08G18/2825 , C08G18/2885 , C08G18/673 , C08G18/7831 , C08G18/792 , G03F7/0046 , G03F7/035 , G03F7/039 , G03F7/09 , Y10T428/24802
Abstract: A photocurable composition comprising a photoresist component, and an ethylenically unsaturated perfluoropolyether is disclosed. The composition enables easier release of phototool from a photoresist.
Abstract translation: 公开了包含光致抗蚀剂组分和烯属不饱和全氟聚醚的光固化组合物。 该组合物能够更容易地从光致抗蚀剂中释放光固醇。
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