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公开(公告)号：EP3038162B1
公开(公告)日：2019-09-04
申请号：EP14200282.3
申请日：2014-12-24
Applicant: ABB Schweiz AG
Inventor： Bauer, Friedhelm , Mihaila, Andrei
IPC: H01L29/872 , H01L29/36 , H01L29/06 , H01L21/329 , H01L29/16
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