公开(公告)号：AU2023311999A1

公开(公告)日：2025-02-06

申请号：AU2023311999

申请日：2023-07-21

Applicant: ACADEMIA SINICA

Inventor： CHOU MEI-YIN ,  LIAO JAMES ,  CHEN YANG-YUAN ,  OU MIN-NAN ,  WU SHAN-LUO

IPC: H05H1/24 ,  H01J37/32 ,  H05H1/34

Abstract: The present disclosure relates to a plasma apparatus and a method. The plasma apparatus comprises an inner electrode and an outer electrode. The inner electrode comprises a wall defining a first cavity, and an opening of the first cavity is configured to receive a first gas. The outer electrode surrounds the inner electrode. The inner electrode has a through-hole extending through the wall of the inner electrode, such that the first cavity is in fluid communication with a plasma generation region between the inner electrode and the outer electrode via the through-hole. The inner electrode is rotatable about a first axis of rotation, and the first axis of rotation extends through the first cavity. In particular, some embodiments of the present disclosure relate to a plasma apparatus and a method for cracking a gas.