公开(公告)号：US12275748B2

公开(公告)日：2025-04-15

申请号：US17917671

申请日：2021-03-31

Applicant: ADEKA CORPORATION

Inventor： Tomoharu Yoshino ,  Yoshiki Ooe ,  Keisuke Takeda ,  Ryota Fukushima ,  Chiaki Mitsui ,  Atsushi Yamashita

IPC: C07F15/06 ,  C01B33/027 ,  C07F5/00 ,  C07F7/02 ,  C07F7/22 ,  C07F13/00 ,  C07F15/04 ,  C23C16/18 ,  C23C16/40 ,  C23C16/455

Abstract: The present invention provides an amidinate compound represented by the following general formula (1) or a dimer compound thereof, and a method of producing a thin-film including using the compound as a raw material: where R1 and R2 each independently represent an alkyl group having 1 to 5 carbon atoms, R3 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, M represents a metal atom or a silicon atom, and “n” represents the valence of the atom represented by M, provided that at least one hydrogen atom of R1 to R3 is substituted with a fluorine atom.