公开(公告)号：EP1125647A4

公开(公告)日：2002-11-27

申请号：EP99970040

申请日：1999-10-01

Applicant: ADVANTEST CORP

Inventor： SUGIMOTO YOSHIMI ,  WATANABE MASAO

IPC: B09B3/00 ,  B01D11/02 ,  B08B7/00 ,  B09B5/00 ,  C22B3/00 ,  C22B7/00 ,  C08J11/00

CPC classification number: B01D11/0203 ,  B08B7/0021 ,  B09B5/00

Abstract: A supercritical fluid is formed by heating a liquid-state water (13) sealed along with a circuit member (30) into an airtight container (2) by an internal heating means (4) to heat the water (13) to not lower than a preset temperature and pressurize it to not lower than a preset pressure. A supercritical fluid, being extremely high in intermolecular collision rate, can deliver a specific dissolution power and activate various reactions favorably to thereby satisfactorily and quickly decompose a circuit member (30) which is difficult to be decomposed by a liquid- or gaseous-state water. In addition, an addition of sulfur (14) to a liquid-state water (13) can recover various metals from a circuit member (30) favorably.

公开(公告)号：DE19927258A1

公开(公告)日：1999-12-23

申请号：DE19927258

申请日：1999-06-15

Applicant: ADVANTEST CORP

Inventor： SUGIMOTO YOSHIMI ,  NAKAYAMA YOSHIKAZU ,  WATANABE MASAO

IPC: G01N22/00 ,  G01N27/20

Abstract: The method involves preparing a standard substrate (103) of high quality, and a symmetrically arranged test substrate (102). A network analyzer (107) is used to make individual measurements of the dispersion characteristics of radio frequency waves within the standard and test substrates to determine whether the test substrate is good or bad. The determination of the quality of the test substrate involves comparison with the characteristics of the standard substrate. The substrates are arranged symmetrically between a series of three electrode plates.

公开(公告)号：JP2000107725A

公开(公告)日：2000-04-18

申请号：JP28140098

申请日：1998-10-02

Applicant: ADVANTEST CORP

Inventor： SUGIMOTO YOSHIMI ,  WATANABE MASAO

IPC: B09B3/00 ,  B01D11/02 ,  B08B7/00 ,  B09B5/00 ,  C22B3/00 ,  C22B7/00

Abstract: PROBLEM TO BE SOLVED: To decompose a circuit member without requiring a poison and a largescale apparatus to enable the recovery of various substances. SOLUTION: Water 13 and a circuit member 30 are sealed in a sealed container and heated by an internal heating means 4, the water 13 is heated at a prescribed temperature or above and pressurized at a prescribed pressure or above to prepare supercritical fluid. The supercritical fluid, in which the frequency of intermolecular collision is extremely high. demonstrates special dissolution power and can activate various reactions remarkably so that a circuit member 30 which can hardly be decomposed in water in the state of liquid or gas can be decomposed well and promptly.

公开(公告)号：JP2000028551A

公开(公告)日：2000-01-28

申请号：JP19148998

申请日：1998-07-07

Applicant: ADVANTEST CORP

Inventor： SUGIMOTO YOSHIMI ,  NAKAYAMA KIWA ,  WATANABE MASAO

IPC: G01N22/02 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To quickly inspect a surface of a substrate with a simple device. SOLUTION: A standard substrate 3 is faced symmetrically to a testing substrate 2 by a substrate arranging means 26 via an electrode member 4, then an RF electromagnetic wave is propagated to the member 4 by a network analyzer 5 to measure a characteristic, and the presence of defects in a surface of the testing substrate 2 is determined by a defective detecting means 25, based on a result measured hereinbefore. Since the surface condition of the substrate 2 is inspected based on a propagation characteristic of the RF electromagnetic wave, neither a device of large scale having complicated structure is not required nor long working time is not required.