公开(公告)号：US20220390741A1

公开(公告)日：2022-12-08

申请号：US17844617

申请日：2022-06-20

Applicant: AG MICROSYSTEMS, INC.

Inventor： Asif GODIL ,  Chase VALIENTE

IPC: G02B26/08

Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.