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1.Method of testing an electronic device by use of an electron beam 失效
Title translation: 通过使用电子束测试电子设备的方法公开(公告)号:US3531716A
公开(公告)日:1970-09-29
申请号:US3531716D
申请日:1968-03-13
Applicant: AGENCY IND SCIENCE TECHN
Inventor: TARUI YASUO , DENDA SEIICHI
IPC: G01R31/305 , G01R31/306 , G01R31/02
CPC classification number: G01R31/306 , G01R31/305