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公开(公告)号：JPH03275596A
公开(公告)日：1991-12-06
申请号：JP7632490
申请日：1990-03-26
Applicant: AGENCY IND SCIENCE TECHN
Inventor： MARUYAMA KATSUHISA , MAKINO MITSUO , KIKUKAWA NOBUYUKI , SHIRAISHI MINORU
IPC: C30B29/04 , C23C16/27 , C23C16/513
Abstract: PURPOSE:To inhibit formation of cubic diamond by utilizing hydrogen plasma jet and forming a diamond film. CONSTITUTION:Hydrogen plasma jet is utilized for heating H2 and a vapor- phase carbon source such as methane which are used in the case of vapor phase synthesis of diamond. The inside of a reaction furnace is regulated to
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