公开(公告)号：GB2341580A

公开(公告)日：2000-03-22

申请号：GB9906291

申请日：1999-03-18

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WANG JUN ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/18 ,  B23K26/40 ,  B28D1/22 ,  C03B33/08 ,  C03C15/00 ,  C03C23/00

Abstract: The surface of a transparent solid substrate 3 in contact with a fluid 2 is etched by passing the beam of a pulsed laser through the substrate. The beam has a fluence of 0.01-100 J/cm 2 /pulse. The fluid may be a solution or dispersion of pyrene, benzil, rhodamine, carbon black, or a gas or a fluidising powder. The substrate may be fused silica, glass, sapphire, calcium fluoride, silicon carbide, alumina, quartz or diamond.

公开(公告)号：DE19912879A1

公开(公告)日：2000-04-20

申请号：DE19912879

申请日：1999-03-23

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WANG JUN ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/18 ,  B23K26/40 ,  B28D1/22 ,  C03B33/08 ,  C03C15/00 ,  C03C23/00

Abstract: A method of etching a surface of a transparent solid material with a laser beam, wherein the surface is irradiated with the laser beam having a fluence of 0.01-100 J/cm2/pulse while maintaining a fluid capable of absorbing the laser beam in contact with an opposite surface of the solid material.

公开(公告)号：DE19912879C2

公开(公告)日：2002-11-07

申请号：DE19912879

申请日：1999-03-23

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WANG JUN ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/18 ,  B23K26/40 ,  B28D1/22 ,  C03B33/08 ,  C03C15/00 ,  C03C23/00

Abstract: A method of etching a surface of a transparent solid material with a laser beam, wherein the surface is irradiated with the laser beam having a fluence of 0.01-100 J/cm2/pulse while maintaining a fluid capable of absorbing the laser beam in contact with an opposite surface of the solid material.

公开(公告)号：GB2341580B

公开(公告)日：2000-11-15

申请号：GB9906291

申请日：1999-03-18

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WANG JUN ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/18 ,  B23K26/40 ,  B28D1/22 ,  C03B33/08 ,  C03C15/00 ,  C03C23/00

Abstract: A method of etching a surface of a transparent solid material with a laser beam, wherein the surface is irradiated with the laser beam having a fluence of 0.01-100 J/cm2/pulse while maintaining a fluid capable of absorbing the laser beam in contact with an opposite surface of the solid material.

公开(公告)号：FR2783448A1

公开(公告)日：2000-03-24

申请号：FR9903449

申请日：1999-03-19

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WANG JUN ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/18 ,  B23K26/40 ,  B28D1/22 ,  C03B33/08 ,  C03C15/00 ,  C03C23/00

Abstract: The surface of a transparent solid substrate in contact with a fluid is etched by passing the beam of a pulsed laser through the substrate. The fluid may be a solution or dispersion of pyrene, benzil, rhodamine, carbon black, or a gas or a fluidising powder. The substrate may be fused silica, glass, sapphire, calcium fluoride, silicon carbide, alumina, quartz or diamond.

公开(公告)号：FR2783448B1

公开(公告)日：2002-12-06

申请号：FR9903449

申请日：1999-03-19

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WANG JUN ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B23K26/00 ,  B23K26/12 ,  B23K26/18 ,  B23K26/40 ,  B28D1/22 ,  C03B33/08 ,  C03C15/00 ,  C03C23/00

Abstract: A method of etching a surface of a transparent solid material with a laser beam, wherein the surface is irradiated with the laser beam having a fluence of 0.01-100 J/cm2/pulse while maintaining a fluid capable of absorbing the laser beam in contact with an opposite surface of the solid material.