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公开(公告)号：US3404949A
公开(公告)日：1968-10-08
申请号：US41085264
申请日：1964-11-13
Applicant: AGENCY IND SCIENCE TECHN
Inventor： YUKIO ITO
IPC: C01B21/082 , C01B21/092 , C01B21/093 , C01B21/096
CPC classification number: C01B21/0935 , C01B21/082 , C01B21/0923 , C01B21/096
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