公开(公告)号：EP3196622A4

公开(公告)日：2018-07-04

申请号：EP15828187

申请日：2015-07-29

Applicant: AIST

Inventor： YOSHIDA HAJIME

IPC: G01L27/00 ,  G01L21/32 ,  G01L21/34

CPC classification number: G01L27/00 ,  G01L21/32 ,  G01L21/34 ,  G01L27/007 ,  G01N27/62 ,  H01J27/02 ,  H01J37/08 ,  H01J41/06

Abstract: Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.