公开(公告)号：US20040126502A1

公开(公告)日：2004-07-01

申请号：US10661476

申请日：2003-09-15

Applicant: ALSTOM

Inventor： Marc Ferrato ,  Alain Petitbon ,  Jean Jarrige

IPC: B05D001/08

CPC classification number: C23C4/18 ,  C04B35/581 ,  C04B35/62665 ,  C04B35/62805 ,  C04B35/6281 ,  C04B35/62815 ,  C04B35/62884 ,  C04B2235/3208 ,  C04B2235/3225 ,  C04B2235/3229 ,  C04B2235/3865 ,  C04B2235/441 ,  C23C4/10 ,  C23C4/12 ,  H01L21/4807

Abstract: A method of fabricating an aluminum nitride (AlN) substrate, wherein the substrate is obtained by spraying a powder onto a support at a high temperature and at a high speed, the powder including AlN grains covered with a layer of an oxide precursor chosen from oxide precursors yielding an oxide forming a liquid phase around the AlN grains during spraying.

Abstract translation: 一种制造氮化铝（AlN）衬底的方法，其中通过在高温和高速下将粉末喷涂到载体上获得衬底，所述粉末包括被选自氧化物的氧化物前体层所覆盖的AlN晶粒 在喷涂期间产生在AlN晶粒周围形成液相的氧化物的前体。