公开(公告)号：AU2013294616B2

公开(公告)日：2016-04-28

申请号：AU2013294616

申请日：2013-07-25

Applicant: APPLE INC

Inventor： SROMIN ALEXANDER ,  CHAYAT NAFTALI ,  ERLICH RAVIV ,  GERSON YUVAL ,  SHPUNT ALEXANDER ,  WEBER RAVIV

IPC: G02B26/08 ,  G02B26/10 ,  H02K33/16

Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

公开(公告)号：AU2013294616A1

公开(公告)日：2015-02-26

申请号：AU2013294616

申请日：2013-07-25

Applicant: APPLE INC

Inventor： SROMIN ALEXANDER ,  CHAYAT NAFTALI ,  ERLICH RAVIV ,  GERSON YUVAL ,  SHPUNT ALEXANDER ,  WEBER RAVIV

IPC: G02B26/08 ,  G02B26/10 ,  H02K33/16

Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

公开(公告)号：AU2013237061B2

公开(公告)日：2015-11-26

申请号：AU2013237061

申请日：2013-03-13

Applicant: APPLE INC

Inventor： CHAYAT NAFTALI ,  GERSON YUVAL

IPC: G02B26/10

Abstract: An optical scanning device (64) includes a substrate (68), which is etched to define an array (100) of two or more parallel micromirrors (102) and a support (72) surrounding the micromirrors. Respective spindles (106) connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members (108) are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.

公开(公告)号：DE112013005128T5

公开(公告)日：2015-08-13

申请号：DE112013005128

申请日：2013-10-22

Applicant: APPLE INC

Inventor： ERLICH RAVIV ,  GERSON YUVAL ,  SHPUNT ALEXANDER

IPC: G02B26/08 ,  B81C1/00 ,  B81C3/00 ,  H01L21/02 ,  H01L21/58 ,  H01L21/68

Abstract: Ein Verfahren zur Herstellung einer Vorrichtung (206) aus einem Wafer (170) aus Halbleitermaterial schließt das lokale Dünnen des Wafers in einem Bereich der Vorrichtung auf eine vordefinierte Dicke, indem das Halbleitermaterial unter Verwendung eines Nassätzprozesses von mindestens einer ersten Seite des Wafers entfernt wird, und das Durchätzen des gedünnten Wafers im Bereich der Vorrichtung ein, sodass ein beweglicher Teil (202) der Vorrichtung freigegeben wird. Zudem werden weitere Verfahren und Systeme zur Herstellung beschrieben.

公开(公告)号：AU2015100178B4

公开(公告)日：2015-07-09

申请号：AU2015100178

申请日：2015-02-16

Applicant: APPLE INC

Inventor： SROMIN ALEXANDER ,  CHAYAT NAFTALI ,  ERLICH RAVIV ,  GERSON YUVAL ,  SHPUNT ALEXANDER ,  WEBER RAVIV

IPC: G02B26/08 ,  G02B26/10 ,  H02K33/16

Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in 5 response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap 0 so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

公开(公告)号：AU2015100178A4

公开(公告)日：2015-03-12

申请号：AU2015100178

申请日：2015-02-16

Applicant: APPLE INC

Inventor： SROMIN ALEXANDER ,  CHAYAT NAFTALI ,  ERLICH RAVIV ,  GERSON YUVAL ,  SHPUNT ALEXANDER ,  WEBER RAVIV

IPC: G02B26/08 ,  G02B26/10 ,  H02K33/16

Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in 5 response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap 0 so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

公开(公告)号：AU2016201128B2

公开(公告)日：2017-05-04

申请号：AU2016201128

申请日：2016-02-23

Applicant: APPLE INC

Inventor： CHAYAT NAFTALI ,  GERSON YUVAL

IPC: G02B26/10

Abstract: An optical scanning device (64) includes a substrate (68), which is etched to define an array (100) of two or more parallel micromirrors (102) and a support (72) surrounding the 5 micromirrors. Respective spindles (106) connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members (108) are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the .0 respective axes.

公开(公告)号：AU2016201128A1

公开(公告)日：2016-03-10

申请号：AU2016201128

申请日：2016-02-23

Applicant: APPLE INC

Inventor： CHAYAT NAFTALI ,  GERSON YUVAL

IPC: G02B26/10

Abstract: An optical scanning device (64) includes a substrate (68), which is etched to define an array (100) of two or more parallel micromirrors (102) and a support (72) surrounding the 5 micromirrors. Respective spindles (106) connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members (108) are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the .0 respective axes.

公开(公告)号：DE112013003679T5

公开(公告)日：2015-04-30

申请号：DE112013003679

申请日：2013-07-25

Applicant: APPLE INC

Inventor： SROMIN ALEXANDER ,  CHAYAT NAFTALI ,  ERLICH RAVIV ,  GERSON YUVAL

IPC: G02B26/08 ,  G02B26/10 ,  H02K33/16

Abstract: Optische Vorrichtung (64) beinhaltet einen Statoraufbau (47), welcher einen Kern (78, 90, 91), der einen Luftspalt und eine oder mehrere Spulen (80, 92, 94, 116, 120) enthält, die einen leitenden Draht, welcher um den Kern umwickelt, beinhaltet, um den Kern zu veranlassen, einen Magnetkreis durch den Luftspalt zu bilden in Reaktion auf einen elektrischen Strom, der in dem leitenden Draht fließt. Ein Scanspiegelaufbau (45, 83, 85, 130) beinhaltet eine Trägerstruktur (68), eine Basis (72), welche montiert ist, um um eine erste Achse relativ zu der Trägerstruktur zu rotieren und einen Spiegel (46), welcher montiert ist, um um eine zweite Achse relativ zu der Basis zu rotieren. Zumindest ein Rotor (76, 132) beinhaltet einen oder mehrere Permanentmagnete, welche an dem Scanspiegelaufbau fixiert sind und welche in dem Luftspalt positioniert sind, um in Reaktion auf den Magnetkreis zu reagieren. Ein Antrieb (82) ist gekoppelt zum Generieren des elektrischen Stroms mit der einen oder den mehreren Spulen.

公开(公告)号：WO2015109273A3

公开(公告)日：2015-09-24

申请号：PCT/US2015011883

申请日：2015-01-18

Applicant: APPLE INC

Inventor： GERSON YUVAL ,  CHAYAT NAFTALI ,  AXELROD NOEL ,  SHPUNT ALEXANDER

IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10

CPC classification number: G02B26/085 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  G02B26/101

Abstract: A scanning device (64, 220, 230) includes a substrate (68), which is etched to define an array of two or more parallel rotating members (102) and a gimbal (72, 232) surrounding the rotating members. First hinges (106, 234) connect the gimbal to the substrate and defining a first axis of rotation, about which the gimbal rotates relative to the substrate. Second hinges (74) connect the rotating members to the support and defining respective second, mutually-parallel axes of rotation of the rotating members relative to the support, which are not parallel to the first axis.